IEEE/LEOS International Conference on Optical MEMs
Cơ quản chủ quản: N/A
Các bài báo tiêu biểu
Development of nano-photonic devices and their integration by optical near field
- Trang 199-200
#Nanoscale devices #Integrated optics #Optical devices #Probes #Optical arrays #Photonic integrated circuits #Data communication #Optical diffraction #Wires #Optical detectors
Đặc trưng của cảm biến khoảng cách quang học vi mô Dịch bởi AI
- Trang 29-30
#Optical sensors #Sensor phenomena and characterization #Optical receivers #Optical scattering #Semiconductor device measurement #Microstructure #Sensor systems #Linearity #Mirrors #Lenses
Design and realization of magnetic actuators for optical matrix micro-switches
- Trang 113-114
#Optical design #Actuators #Microswitches #Mirrors #Optical fibers #Optical beams #Copper #Silicon #Springs #Electromagnetic compatibility
Micromirrors with electrically tunable curvature
- Trang 191-192
#Micromirrors #Mirrors #Coatings #Stress #Testing #Heating #Temperature #Optical devices #Optical surface waves #Gold
Challenges in optical MEMS commercialization and MEMS foundry
- Trang 157-158
#Micromechanical devices #Commercialization #Foundries #Optical sensors #Optical devices #Optical films #Microelectromechanical devices #Production #Photonic integrated circuits #Sensor arrays
Segmented deformable micro-mirror for free-space optical communication
- Trang 197-198
#Optical fiber communication #Mirrors #Bonding #Electrodes #Actuators #Micromechanical devices #Gold #Etching #Adaptive optics #Fabrication
Air damping of mechanical microbeam resonators with optical excitation and optical detection
- Trang 61-62
#Optical resonators #Damping #Optical detectors #Finite element methods #Mechanical variables measurement #Pressure measurement #Q factor #Air gaps #Software prototyping #Prototypes
Microlenses array fabrication by hot embossing process
- Trang 73-74
#Lenses #Microoptics #Embossing #Rough surfaces #Surface roughness #Optical arrays #Optical devices #Temperature #Optical device fabrication #Atomic measurements
Using extended BELST process in fabricating vertical comb actuator for optical application
- Trang 133-134
#Etching #Silicon #Electrostatic actuators #Micromachining #Microstructure #Wafer bonding #Boron #Mirrors #Springs #Voltage
Micro-fabricated system for wavelengths monitoring
- Trang 23-24
#Monitoring #Optical interferometry #Mirrors #Lenses #Optical devices #Silicon #Resists #Biomedical optical imaging #Optical sensors #Spectroscopy