Diamond micro-opticsIEEE/LEOS International Conference on Optical MEMs - - Trang 141-142
M. Karlsson, F. Nikolajeff
#Optical refraction #Lenses #Microoptics #Resists #Gratings #Dry etching #Conducting materials #Optical materials #Optical diffraction #Optical device fabrication
Micromachined two-chip filters for WDM transmission systemsIEEE/LEOS International Conference on Optical MEMs - - Trang 167-168
P. Meissner, M. Aziz, H. Halbritter, F. Riemenschneider, J. Pfeiffer, T. Hermes
#Wavelength division multiplexing #Optical filters #Tunable circuits and devices #Mirrors #Biomembranes #Laser tuning #Optical tuning #Optical transmitters #Dielectric substrates #Bit error rate
Monolithic vertical combdrive actuators for adaptive opticsIEEE/LEOS International Conference on Optical MEMs - - Trang 57-58
V. Milanovic, Sunghoon Kwon, L.P. Lee
#Actuators #Adaptive optics #Micromirrors #Biomedical optical imaging #Optical sensors #Micromechanical devices #Bidirectional control #Optical device fabrication #Silicon on insulator technology #Phased arrays
New MOEMS-switch device with electrostatic actuatorIEEE/LEOS International Conference on Optical MEMs - - Trang 159-160
E. Thielicke, E. Obermeier
#Electrostatic actuators #Optical fiber networks #Optical switches #Hydraulic actuators #Electrodes #Mirrors #Optical materials #Costs #Micromechanical devices #Micromachining
Bulk micromachined electrostatic beam steering micromirror arrayIEEE/LEOS International Conference on Optical MEMs - - Trang 15-16
M.R. Dokmeci, S. Bakshi, M. Waelti, A. Pareek, C. Fung, C.H. Mastrangelo
#Electrostatics #Beam steering #Micromirrors #Silicon #Mirrors #Micromachining #Wafer bonding #Gold #Electrodes #Low voltage