Segmented deformable micro-mirror for free-space optical communication
IEEE/LEOS International Conference on Optical MEMs - Trang 197-198
Tóm tắt
In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.
Từ khóa
#Optical fiber communication #Mirrors #Bonding #Electrodes #Actuators #Micromechanical devices #Gold #Etching #Adaptive optics #FabricationTài liệu tham khảo
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