M. Karlsson1, F. Nikolajeff1
1The Ångstrom Laboratory, University of Uppsala, Uppsala, Sweden
Tóm tắt
Diamond has the widest optical transparency window (220 nm and above) and the highest thermal conductivity of all materials known. It is therefore attractive to fabricate diffractive or refractive optical elements in diamond for e.g. high-power laser applications. In this paper we describe the transfer of several micro-optical structures, originally made in resist, into diamond of optical quality. This paper describes for the first time how refractive microlenses and diffractive fan-out elements have been fabricated in diamond.
Từ khóa
#Optical refraction #Lenses #Microoptics #Resists #Gratings #Dry etching #Conducting materials #Optical materials #Optical diffraction #Optical device fabricationTài liệu tham khảo
10.1088/0957-4484/10/4/304
10.1364/OL.26.001752
10.1070/QE1999v029n01ABEH001402