Microsystem Technologies
SCIE-ISI SCOPUS (1994-2025)
1432-1858
0946-7076
Cơ quản chủ quản: Springer Heidelberg , Springer Verlag
Lĩnh vực:
Hardware and ArchitectureNanoscience and NanotechnologyElectronic, Optical and Magnetic MaterialsCondensed Matter PhysicsElectrical and Electronic Engineering
Các bài báo tiêu biểu
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz
- 2012
Highly sensitive nonlinear photonic crystal fiber based sensor for chemical sensing applications
Tập 27 Số 3 - Trang 1007-1014 - 2021
Polymeric microneedle fabrication using a microinjection molding technique
Tập 13 Số 5-6 - Trang 517-522 - 2007
Superplastic extrusion of microgear shaft of 10 μm in module
Tập 6 - Trang 126-129 - 2000
The goal of this study is to establish microforming technologies for MEMS parts
such as microgears of 10 micrometers in module. For this purpose, it is
important to develop new methods to fabricate microdies and to select suitable
materials for microforming. Photochemically machinable glass has been used to
fabricate microdies by photolithography and anisotropic etching techniques.
Al-78Zn superp...