Two-dimensional optoelectronic devices for silicon photonic integration
Tài liệu tham khảo
Miller, 2000, Rationale and challenges for optical interconnects to electronic chips, Proc IEEE, 88, 728, 10.1109/5.867687
Shacham, 2008, Photonic networks-on-chip for future generations of chip multiprocessors, IEEE Trans Comput, 57, 1246, 10.1109/TC.2008.78
Vlasov, 2012, Silicon CMOS-integrated nano-photonics for computer and data communications beyond 100G, IEEE Commun Mag, 50, s67, 10.1109/MCOM.2012.6146487
Ohashi, 2007, In A silicon photonics approach for the nanotechnology era, 787
Shastri, 2021, In silicon photonics for artificial intelligence and neuromorphic computing, 1
Hoefflinger, 2012, The international technology Roadmap for semiconductors, 161
Chiang, 2011, In Challenges of future silicon IC technology, 1
Chen, 2009, In Challenges for silicon technology scaling in the Nanoscale Era, 1
Theis, 2017, The end of Moore's law: a new beginning for information technology, Comput Sci Eng, 19, 41, 10.1109/MCSE.2017.29
Gonzalez-Zalba, 2021, Scaling silicon-based quantum computing using CMOS technology, Nat. Electron., 4, 872, 10.1038/s41928-021-00681-y
Akinwande, 2019, Graphene and two-dimensional materials for silicon technology, Nature, 573, 507, 10.1038/s41586-019-1573-9
Prasad, 2021, Introduction, history, and origin of two dimensional (2D) materials, 1
Zhao, 2022, Molecular approach to engineer two-dimensional devices for CMOS and beyond-CMOS applications, Chem Rev, 122, 50, 10.1021/acs.chemrev.1c00497
Duan, 2015, Two-dimensional transition metal dichalcogenides as atomically thin semiconductors: opportunities and challenges, Chem Soc Rev, 44, 8859, 10.1039/C5CS00507H
Jariwala, 2017, Mixed-dimensional van der Waals heterostructures, Nat Mater, 16, 170, 10.1038/nmat4703
Mak, 2016, Photonics and optoelectronics of 2D semiconductor transition metal dichalcogenides, Nat Photonics, 10, 216, 10.1038/nphoton.2015.282
Wang, 2017, Graphene, hexagonal boron nitride, and their heterostructures: properties and applications, RSC Adv, 7, 16801, 10.1039/C7RA00260B
Castellanos-Gomez, 2022, Van der Waals heterostructures, Nat. Rev. Methods Primers, 2, 58, 10.1038/s43586-022-00139-1
Liang, 2019, Van der Waals heterostructures for high-performance device applications: challenges and opportunities, Adv Mater, 10.1002/adma.201903800
You, 2020, Hybrid/integrated silicon photonics based on 2D materials in optical communication nanosystems, Laser Photon Rev, 14, 10.1002/lpor.202000239
Romagnoli, 2018, Graphene-based integrated photonics for next-generation datacom and telecom, Nat Rev Mater, 3, 392, 10.1038/s41578-018-0040-9
Youngblood, 2016, Integration of 2D materials on a silicon photonics platform for optoelectronics applications, Nanophotonics, 6, 1205, 10.1515/nanoph-2016-0155
Zhong, 2020, Graphene-based all-optical modulators, Front Optoelectron, 13, 114, 10.1007/s12200-020-1020-4
Yang, 2017, Van der Waals epitaxial growth and optoelectronics of large-scale WSe2/SnS2 vertical bilayer p–n junctions, Nat Commun, 8, 1906, 10.1038/s41467-017-02093-z
Wang, 2020, Mid-infrared polarized emission from black phosphorus light-emitting diodes, Nano Lett, 20, 3651, 10.1021/acs.nanolett.0c00581
Paik, 2019, Interlayer exciton laser of extended spatial coherence in atomically thin heterostructures, Nature, 576, 80, 10.1038/s41586-019-1779-x
Fang, 2018, 1305 nm few-layer MoTe2 -on-Silicon laser-like emission, Laser Photon Rev, 12
Qiu, 2017, All-optical control of light on a graphene-on-silicon nitride chip using thermo-optic effect, Sci Rep, 7, 10.1038/s41598-017-16989-9
Sarkar, 2019, Chapter 9 - 2D materials for field-effect transistor–based biosensors, 329
Das, 2021, Transistors based on two-dimensional materials for future integrated circuits, Nat. Electron., 4, 786, 10.1038/s41928-021-00670-1
Huang, 2017, Black phosphorus: optical characterization, properties and applications, Small, 13, 10.1002/smll.201700823
Xu, 2020, Epitaxial nucleation and lateral growth of high-crystalline black phosphorus films on silicon, Nat Commun, 11, 1330, 10.1038/s41467-020-14902-z
Cai, 2019, High thermal conductivity of high-quality monolayer boron nitride and its thermal expansion, Sci Adv, 5, 10.1126/sciadv.aav0129
Elias, 2019, Direct band-gap crossover in epitaxial monolayer boron nitride, Nat Commun, 10, 2639, 10.1038/s41467-019-10610-5
Cassabois, 2016, Intervalley scattering in hexagonal boron nitride, Phys Rev B, 93, 10.1103/PhysRevB.93.035207
Dean, 2010, Boron nitride substrates for high-quality graphene electronics, Nat Nanotechnol, 5, 722, 10.1038/nnano.2010.172
Duan, 2014, Lateral epitaxial growth of two-dimensional layered semiconductor heterojunctions, Nat Nanotechnol, 9, 1024, 10.1038/nnano.2014.222
Chen, 2021, Two-dimensional WS2/MoS2 heterostructures: properties and applications, Nanoscale, 13, 5594, 10.1039/D1NR00455G
Gong, 2014, Vertical and in-plane heterostructures from WS2/MoS2 monolayers, Nat Mater, 13, 1135, 10.1038/nmat4091
Wang, 2013, High-responsivity graphene/silicon-heterostructure waveguide photodetectors, Nat Photonics, 7, 888, 10.1038/nphoton.2013.241
Hong, 2014, Ultrafast charge transfer in atomically thin MoS2/WS2 heterostructures, Nat Nanotechnol, 9, 682, 10.1038/nnano.2014.167
Froehlicher, 2016, Direct versus indirect band gap emission and exciton-exciton annihilation in atomically thin molybdenum ditelluride (MoTe2), Phys Rev B, 94, 10.1103/PhysRevB.94.085429
Liu, 2017, Nanocavity integrated van der Waals heterostructure light-emitting tunneling diode, Nano Lett, 17, 200, 10.1021/acs.nanolett.6b03801
Reed, 2015, Wavelength tunable microdisk cavity light source with a chemically enhanced MoS2 emitter, Nano Lett, 15, 1967, 10.1021/nl5048303
Wu, 2015, Monolayer semiconductor nanocavity lasers with ultralow thresholds, Nature, 520, 69, 10.1038/nature14290
Aoki, 2008, Coupling of quantum-dot light emission with a three-dimensional photonic-crystal nanocavity, Nat Photonics, 2, 688, 10.1038/nphoton.2008.202
Li, 2017, Room-temperature continuous-wave lasing from monolayer molybdenum ditelluride integrated with a silicon nanobeam cavity, Nat Nanotechnol, 12, 987, 10.1038/nnano.2017.128
Li, 2020, Wavelength-tunable interlayer exciton emission at the near-infrared region in van der Waals semiconductor heterostructures, Nano Lett, 20, 3361, 10.1021/acs.nanolett.0c00258
Zhang, 2020, Wavelength-tunable mid-infrared lasing from black phosphorus nanosheets, Adv Mater, 32
Lien, 2018, Large-area and bright pulsed electroluminescence in monolayer semiconductors, Nat Commun, 9, 10.1038/s41467-018-03218-8
Feng, 2022, Injection-free multiwavelength electroluminescence devices based on monolayer semiconductors driven by an alternating field, Sci Adv, 8, 10.1126/sciadv.abl5134
Ross, 2014, Electrically tunable excitonic light-emitting diodes based on monolayer WSe2 p–n junctions, Nat Nanotechnol, 9, 268, 10.1038/nnano.2014.26
Bie, 2017, A MoTe2-based light-emitting diode and photodetector for silicon photonic integrated circuits, Nat Nanotechnol, 12, 1124, 10.1038/nnano.2017.209
Lien, 2018, Large-area and bright pulsed electroluminescence in monolayer semiconductors, Nat Commun, 9, 1229, 10.1038/s41467-018-03218-8
Yang, 2022, A waveguide-integrated two-dimensional light-emitting diode based on p-type WSe2/n-Type CdS nanoribbon heterojunction, ACS Nano, 16, 4371, 10.1021/acsnano.1c10607
Shang, 2017, Room-temperature 2D semiconductor activated vertical-cavity surface-emitting lasers, Nat Commun, 8, 543, 10.1038/s41467-017-00743-w
Duong, 2018, Enhanced emission from WSe2 monolayers coupled to circular Bragg gratings, ACS Photonics, 5, 3950, 10.1021/acsphotonics.8b00865
Fang, 2018, 1305 nm few-layer MoTe2 -on-Silicon laser-like emission, Laser Photon Rev, 12
Zhao, 2018, High-temperature continuous-wave pumped lasing from large-area monolayer semiconductors grown by chemical vapor deposition, ACS Nano, 12, 9390, 10.1021/acsnano.8b04511
Winn, 2004, The central image of a gravitationally lensed quasar, Nature, 427, 613, 10.1038/nature02279
Liao, 2005, High speed silicon Mach-Zehnder modulator, Opt Express, 13, 3129, 10.1364/OPEX.13.003129
Long, 2017, Channel-selective wavelength conversion of quadrature amplitude modulation signal using a graphene-assisted silicon microring resonator, Opt Lett, 42, 799, 10.1364/OL.42.000799
Sinatkas, 2019, Comparative study of silicon photonic modulators based on transparent conducting Oxide and graphene, Phys. Rev. Appl., 12, 10.1103/PhysRevApplied.12.064023
Yamane, 2002, Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method, J Appl Phys, 91, 9772, 10.1063/1.1481958
Yu, 2014, Graphene-based transparent flexible heat conductor for thermally tuning nanophotonic integrated devices, Appl Phys Lett, 105, 10.1063/1.4905002
Gan, 2015, A highly efficient thermo-optic microring modulator assisted by graphene, Nanoscale, 7, 20249, 10.1039/C5NR05084G
Zulfiqar, 2019, Intrinsic Thermal conductivities of monolayer transition metal dichalcogenides MX2 (M = Mo, W; X = S, Se, Te), Sci Rep, 9, 4571, 10.1038/s41598-019-40882-2
Singh, 2011, On the accuracy of classical and long wavelength approximations for phonon transport in graphene, J Appl Phys, 110, 10.1063/1.3665226
Yu, 2016, Thermally tunable silicon photonic microdisk resonator with transparent graphene nanoheaters, Optica, 3, 159, 10.1364/OPTICA.3.000159
Xu, 2017, Ultra-compact tunable silicon nanobeam cavity with an energy-efficient graphene micro-heater, Opt Express, 25, 19479, 10.1364/OE.25.019479
Yan, 2017, Slow-light-enhanced energy efficiency for graphene microheaters on silicon photonic crystal waveguides, Nat Commun, 8, 10.1038/ncomms14411
Wei, 2020, All-optical PtSe2 silicon photonic modulator with ultra-high stability, Photon Res, 8, 1189, 10.1364/PRJ.392512
Qiu, 2021, High-performance graphene-on-silicon nitride all-optical switch based on a mach–zehnder interferometer, J Lightwave Technol, 39, 2099, 10.1109/JLT.2020.3045472
Apell, 2012, High optical absorption in graphene, arXivLabs, 1201, 3071
Wang, 2008, Gate-variable optical transitions in graphene, Science, 320, 206, 10.1126/science.1152793
Qiu, 2014, Efficient modulation of 1.55 μm radiation with gated graphene on a silicon microring resonator, Nano Lett, 14, 6811, 10.1021/nl502363u
Ding, 2015, Effective electro-optical modulation with high extinction ratio by a graphene–silicon microring resonator, Nano Lett, 15, 4393, 10.1021/acs.nanolett.5b00630
Phare, 2015, Graphene electro-optic modulator with 30 GHz bandwidth, Nat Photonics, 9, 511, 10.1038/nphoton.2015.122
Bagheri, 2016, Phosphorene: a new competitor for graphene, Int J Hydrogen Energy, 41, 4085, 10.1016/j.ijhydene.2016.01.034
Xia, 2019, Black phosphorus and its isoelectronic materials, Nat. Rev. Phys., 1, 306, 10.1038/s42254-019-0043-5
Sorianello, 2018, Graphene–silicon phase modulators with gigahertz bandwidth, Nat Photonics, 12, 40, 10.1038/s41566-017-0071-6
Datta, 2020, Low-loss composite photonic platform based on 2D semiconductor monolayers, Nat Photonics, 14, 256, 10.1038/s41566-020-0590-4
Ono, 2020, Ultrafast and energy-efficient all-optical switching with graphene-loaded deep-subwavelength plasmonic waveguides, Nat Photonics, 14, 37, 10.1038/s41566-019-0547-7
Basiri, 2022, Ultrafast low-pump fluence all-optical modulation based on graphene-metal hybrid metasurfaces, Light Sci Appl, 11, 102, 10.1038/s41377-022-00787-8
Ooi, 2017, All-optical control on a graphene-on-silicon waveguide modulator, Sci Rep, 7, 10.1038/s41598-017-13213-6
Xing, 2010, The physics of ultrafast saturable absorption in graphene, Opt Express, 18, 4564, 10.1364/OE.18.004564
Yu, 2014, Local and nonlocal optically induced transparency effects in graphene–silicon hybrid nanophotonic integrated circuits, ACS Nano, 8, 11386, 10.1021/nn504377m
Wang, 2020, CMOS-compatible all-optical modulator based on the saturable absorption of graphene, Photon Res, 8, 468, 10.1364/PRJ.380170
AlAloul, 2021, Low insertion loss plasmon-enhanced graphene all-optical modulator, ACS Omega, 6, 7576, 10.1021/acsomega.0c06108
Klein, 2019, 2D semiconductor nonlinear plasmonic modulators, Nat Commun, 10, 3264, 10.1038/s41467-019-11186-w
Yang, 2018, CMOS-compatible WS2-based all-optical modulator, ACS Photonics, 5, 342, 10.1021/acsphotonics.7b01206
Sun, 2021, All-optical modulation based on MoS2-Plasmonic nanoslit hybrid structures, Nanophotonics, 10, 3957, 10.1515/nanoph-2021-0279
Qiu, 2017, All-optical control of light on a graphene-on-silicon nitride chip using thermo-optic effect, Sci Rep, 7, 10.1038/s41598-017-16989-9
Li, 2020, Hybrid silicon photonic devices with two-dimensional materials, Nanophotonics, 9, 2295, 10.1515/nanoph-2020-0093
Cao, 2020, Multicolor broadband and fast photodetector based on InGaAs–insulator–graphene hybrid heterostructure, Adv. Electron. Mater., 6, 10.1002/aelm.201901007
Sun, 2017, Broadband ultrafast photovoltaic detectors based on large-scale topological insulator Sb2Te3/STO heterostructures, Nanoscale, 9, 9325, 10.1039/C7NR01715D
Jiang, 2017, Broadband high-responsivity photodetectors based on large-scale topological crystalline insulator SnTe ultrathin film grown by molecular beam epitaxy, Adv Opt Mater, 5, 10.1002/adom.201600727
Fang, 2020, Mid-infrared photonics using 2D materials: status and challenges, Laser Photon Rev, 14, 10.1002/lpor.201900098
Koppens, 2014, Photodetectors based on graphene, other two-dimensional materials and hybrid systems, Nat Nanotechnol, 9, 780, 10.1038/nnano.2014.215
Zhu, 2014, Electronic transport and device prospects of monolayer molybdenum disulphide grown by chemical vapour deposition, Nat Commun, 5, 3087, 10.1038/ncomms4087
Furchi, 2014, Mechanisms of photoconductivity in atomically thin MoS2, Nano Lett, 14, 6165, 10.1021/nl502339q
Vu, 2017, Tuning carrier tunneling in van der Waals heterostructures for ultrahigh detectivity, Nano Lett, 17, 453, 10.1021/acs.nanolett.6b04449
Ma, 2016, Tuning ultrafast electron thermalization pathways in a van der Waals heterostructure, Nat Phys, 12, 455, 10.1038/nphys3620
Vicarelli, 2012, Graphene field-effect transistors as room-temperature terahertz detectors, Nat Mater, 11, 865, 10.1038/nmat3417
Long, 2019, Progress, challenges, and opportunities for 2D material based photodetectors, Adv Funct Mater, 29, 10.1002/adfm.201803807
Wu, 2021, Two-dimensional materials for integrated photonics: recent advances and future challenges, Small Sci, 1, 10.1002/smsc.202000053
Liu, 2021, Silicon/2D-material photodetectors: from near-infrared to mid-infrared, Light Sci Appl, 10, 123, 10.1038/s41377-021-00551-4
Bonaccorso, 2010, Graphene photonics and optoelectronics, Nat Photonics, 4, 611, 10.1038/nphoton.2010.186
Bao, 2012, Graphene photonics, plasmonics, and broadband optoelectronic devices, ACS Nano, 6, 3677, 10.1021/nn300989g
Mueller, 2010, Graphene photodetectors for high-speed optical communications, Nat Photonics, 4, 297, 10.1038/nphoton.2010.40
Morozov, 2008, Giant intrinsic carrier mobilities in graphene and its bilayer, Phys Rev Lett, 100, 10.1103/PhysRevLett.100.016602
Sun, 2012, Ultrafast hot-carrier-dominated photocurrent in graphene, Nat Nanotechnol, 7, 114, 10.1038/nnano.2011.243
Sugihara, 1979, Temperature dependence of the average mobility in graphite, J Phys Soc Jpn, 47, 1210, 10.1143/JPSJ.47.1210
Urich, 2011, Intrinsic response time of graphene photodetectors, Nano Lett, 11, 2804, 10.1021/nl2011388
Bistritzer, 2009, Electronic cooling in graphene, Phys Rev Lett, 102, 10.1103/PhysRevLett.102.206410
Lee, 2008, Contact and edge effects in graphene devices, Nat Nanotechnol, 3, 486, 10.1038/nnano.2008.172
Berger, 2006, Electronic confinement and coherence in patterned epitaxial graphene, Science, 312, 1191, 10.1126/science.1125925
Tian, 2022, Chip-integrated van der Waals PN heterojunction photodetector with low dark current and high responsivity, Light Sci Appl, 11, 101, 10.1038/s41377-022-00784-x
Youngblood, 2015, Waveguide-integrated black phosphorus photodetector with high responsivity and low dark current, Nat Photonics, 9, 247, 10.1038/nphoton.2015.23
Schuler, 2021, High-responsivity graphene photodetectors integrated on silicon microring resonators, Nat Commun, 12, 3733, 10.1038/s41467-021-23436-x
Gan, 2013, Chip-integrated ultrafast graphene photodetector with high responsivity, Nat Photonics, 7, 883, 10.1038/nphoton.2013.253
Zhang, 2014, Direct imaging of band profile in single layer MoS2 on graphite: quasiparticle energy gap, metallic edge states, and edge band bending, Nano Lett, 14, 2443, 10.1021/nl501133c
Ugeda, 2014, Giant bandgap renormalization and excitonic effects in a monolayer transition metal dichalcogenide semiconductor, Nat Mater, 13, 1091, 10.1038/nmat4061
He, 2014, Tightly bound excitons in monolayer WSe2, Phys Rev Lett, 113, 10.1103/PhysRevLett.113.026803
Berkelbach, 2013, Theory of neutral and charged excitons in monolayer transition metal dichalcogenides, Phys Rev B, 88, 10.1103/PhysRevB.88.045318
Yu, 2013, Highly efficient gate-tunable photocurrent generation in vertical heterostructures of layered materials, Nat Nanotechnol, 8, 952, 10.1038/nnano.2013.219
Pospischil, 2014, Solar-energy conversion and light emission in an atomic monolayer p–n diode, Nat Nanotechnol, 9, 257, 10.1038/nnano.2014.14
Baugher, 2014, Optoelectronic devices based on electrically tunable p–n diodes in a monolayer dichalcogenide, Nat Nanotechnol, 9, 262, 10.1038/nnano.2014.25
Tsai, 2013, Few-layer MoS2 with high broadband photogain and fast optical switching for use in harsh environments, ACS Nano, 7, 3905, 10.1021/nn305301b
Lopez-Sanchez, 2013, Ultrasensitive photodetectors based on monolayer MoS2, Nat Nanotechnol, 8, 497, 10.1038/nnano.2013.100
Lee, 2014, Atomically thin p–n junctions with van der Waals heterointerfaces, Nat Nanotechnol, 9, 676, 10.1038/nnano.2014.150
Withers, 2015, Light-emitting diodes by band-structure engineering in van der Waals heterostructures, Nat Mater, 14, 301, 10.1038/nmat4205
Lee, 2012, MoS2 nanosheet phototransistors with thickness-modulated optical energy gap, Nano Lett, 12, 3695, 10.1021/nl301485q
Britnell, 2013, Strong light-matter interactions in heterostructures of atomically thin films, Science, 340, 1311, 10.1126/science.1235547
Chen, 2017, Widely tunable black phosphorus mid-infrared photodetector, Nat Commun, 8, 1672, 10.1038/s41467-017-01978-3
Chaves, 2020, Bandgap engineering of two-dimensional semiconductor materials, npj 2D Mater. Appl., 4, 29, 10.1038/s41699-020-00162-4
Flory, 2020, Waveguide-integrated van der Waals heterostructure photodetector at telecom wavelengths with high speed and high responsivity, Nat Nanotechnol, 15, 118, 10.1038/s41565-019-0602-z
Maiti, 2020, Strain-engineered high-responsivity MoTe2 photodetector for silicon photonic integrated circuits, Nat Photonics, 14, 578, 10.1038/s41566-020-0647-4
Wu, 2021, High-performance waveguide-integrated Bi2O2Se photodetector for Si photonic integrated circuits, ACS Nano, 15, 15982, 10.1021/acsnano.1c04359
Wu, 2022, Waveguide-integrated PdSe2 photodetector over a broad infrared wavelength range, Nano Lett, 22, 6816, 10.1021/acs.nanolett.2c02099
Zhou, 2016, Vertical metal-semiconductor-metal deep UV photodetectors based on hexagonal boron nitride nanosheets prepared by laser plasma deposition, Opt Mater Express, 6, 10.1364/OME.6.003286
Rivera, 2017, High operating temperature and low power consumption boron nitride nanosheets based broadband UV photodetector, Sci Rep, 7, 10.1038/srep42973
Gao, 2019, Catalyst-free growth of two-dimensional hexagonal boron nitride few-layers on sapphire for deep ultraviolet photodetectors, J Mater Chem C, 7, 14999, 10.1039/C9TC05206B
Liu, 2018, High-performance deep ultraviolet photodetectors based on few-layer hexagonal boron nitride, Nanoscale, 10, 5559, 10.1039/C7NR09438H
Zheng, 2018, Vacuum-ultraviolet photodetection in few-layered h-BN, ACS Appl Mater Interfaces, 10, 27116, 10.1021/acsami.8b07189
Balci, 2015, Graphene-enabled electrically switchable radar-absorbing surfaces, Nat Commun, 6, 6628, 10.1038/ncomms7628
Engel, 2014, Black phosphorus photodetector for multispectral, high-resolution imaging, Nano Lett, 14, 6414, 10.1021/nl502928y
Lien, 2020, Ranging and light field imaging with transparent photodetectors, Nat Photonics, 14, 143, 10.1038/s41566-019-0567-3
Mennel, 2020, Ultrafast machine vision with 2D material neural network image sensors, Nature, 579, 62, 10.1038/s41586-020-2038-x
Goossens, 2017, Broadband image sensor array based on graphene–CMOS integration, Nat Photonics, 11, 366, 10.1038/nphoton.2017.75
Choi, 2020, Curved neuromorphic image sensor array using a MoS2-organic heterostructure inspired by the human visual recognition system, Nat Commun, 11, 5934, 10.1038/s41467-020-19806-6
Rahim, 2018, Open-access silicon photonics: current status and emerging initiatives, Proc IEEE, 106, 2313, 10.1109/JPROC.2018.2878686
Wang, 2019, Integrated photonic quantum technologies, Nat Photonics, 14, 273, 10.1038/s41566-019-0532-1
Tian, 2022, Chip-integrated van der Waals PN heterojunction photodetector with low dark current and high responsivity, Light Sci Appl, 11, 101, 10.1038/s41377-022-00784-x
Novoselov, 2016, 2D materials and van der Waals heterostructures, Science, 353, aac9439, 10.1126/science.aac9439
Wang, 2014, Two-dimensional heterostructures: fabrication, characterization, and application, Nanoscale, 6, 12250, 10.1039/C4NR03435J
Li, 2018, Composition modulation in one-dimensional and two-dimensional chalcogenide semiconductor nanostructures, Chem Soc Rev, 47, 7504, 10.1039/C8CS00418H
Li, 2022, Wafer-scale single-crystal monolayer graphene grown on sapphire substrate, Nat Mater, 21, 740, 10.1038/s41563-021-01174-1
Li, 2022, Chemical vapor deposition of 4 inch wafer-scale monolayer MoSe2, Small Sci, 13, 2200062, 10.1002/smsc.202200062
Kleinert, 2016, Graphene-based electro-absorption modulator integrated in a passive polymer waveguide platform, Opt Mater Express, 6, 1800, 10.1364/OME.6.001800
Colombo, 2013, Graphene growth and device integration, Proc IEEE, 101, 1536, 10.1109/JPROC.2013.2260114
Chang, 2022, Graphene-integrated waveguides: properties, preparation, and applications, Nano Res, 15, 9704, 10.1007/s12274-022-4539-4
Cheng, 2021, 2D materials enabled next-generation integrated optoelectronics: from fabrication to applications, Adv Sci, 8, 10.1002/advs.202003834
Ren, 2021, Orbital-angular-momentum-controlled hybrid nanowire circuit, Nano Lett, 21, 6220, 10.1021/acs.nanolett.1c01979
Huang, 2021, Crystalline chirality and interlocked double hourglass Weyl fermion in polyhedra-intercalated transition metal dichalcogenides, NPG Asia Mater, 13, 49, 10.1038/s41427-021-00316-w
Kurpas, 2018, Spin properties of black phosphorus and phosphorene, and their prospects for spincalorics, J Phys D Appl Phys, 51, 10.1088/1361-6463/aab5a2
Rivera, 2016, Valley-polarized exciton dynamics in a 2D semiconductor heterostructure, Science, 351, 688, 10.1126/science.aac7820
Zhang, 2022, 2D spontaneous valley polarization from inversion symmetric single-layer lattices, npj Comput. Mater., 8, 64, 10.1038/s41524-022-00748-0
Hu, 2020, CMOS-compatible a-Si metalenses on a 12-inch glass wafer for fingerprint imaging, Nanophotonics, 9, 823, 10.1515/nanoph-2019-0470
Ono, 2019, Ultrafast and energy-efficient all-optical switching with graphene-loaded deep-subwavelength plasmonic waveguides, Nat Photonics, 14, 37, 10.1038/s41566-019-0547-7
Huang, 2021, Monolayer WS2 based electro-absorption modulator, Opt Mater, 113, 10.1016/j.optmat.2021.110851
Zhang, 2020, Palladium selenide as a broadband saturable absorber for ultra-fast photonics, Nanophotonics, 9, 2557, 10.1515/nanoph-2020-0116
Liu, 2018, Three-dimensional integration of plasmonics and nanoelectronics, Nat. Electron., 1, 644, 10.1038/s41928-018-0176-z
Zhu, 2021, The development of integrated circuits based on two-dimensional materials, Nat. Electron., 4, 775, 10.1038/s41928-021-00672-z
Lin, 2013, Polarization-controlled tunable directional coupling of surface plasmon polaritons, Science, 340, 331, 10.1126/science.1233746
Bozhevolnyi, 2006, Channel plasmon subwavelength waveguide components including interferometers and ring resonators, Nature, 440, 508, 10.1038/nature04594
Davis, 2016, Plasmonic circuits for manipulating optical information, Nanophotonics, 6, 543, 10.1515/nanoph-2016-0131
Yu, 2011, Light propagation with phase discontinuities: generalized laws of reflection and refraction, Science, 334, 333, 10.1126/science.1210713