Etch-stop process for precisely controlling the vertical cavity length of GaN-based devices

Materials Science in Semiconductor Processing - Tập 120 - Trang 105265 - 2020
Yen-Yu Liu1, Tsung-Che Wu1, Pinghui S. Yeh1
1Department of Electronic and Computer Engineering and Graduate Institute of Electro-Optical Engineering, National Taiwan University of Science and Technology, Taipei, 106, Taiwan

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Materials Science in Semiconductor Processing

Tập 120

105265

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