Journal of Microelectromechanical Systems

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Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 317-321 - 2002
R.J. Grow, S.C. Minne, S.R. Manalis, C.F. Quate
High-resolution atomic force microscopy (AFM) of soft or fragile samples requires a cantilever with a low spring constant and a sharp tip. We have developed a novel process for making such cantilevers from silicon nitride with oxidation-sharpened silicon tips. First, we made and sharpened silicon tips on a silicon wafer. Next, we deposited a thin film of silicon nitride over the tips and etched it... hiện toàn bộ
#Silicon #Atomic force microscopy #Springs #Etching #High-resolution imaging #Semiconductor thin films #Sputtering #Substrates #Scanning electron microscopy #Noise measurement
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 385-401 - 2002
M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, E. Smulders, M.-J. Gilde, G. Roelofs, J.N. Sasserath, M. Elwenspoek
This paper presents guidelines for the deep reactive ion etching (DRIE) of silicon MEMS structures, employing SF/sub 6//O/sub 2/-based high-density plasmas at cryogenic temperatures. Procedures of how to tune the equipment for optimal results with respect to etch rate and profile control are described. Profile control is a delicate balance between the respective etching and deposition rates of a S... hiện toàn bộ
#Plasma temperature #Guidelines #Etching #Silicon #Micromechanical devices #Plasma applications #Cryogenics #Kinetic energy #Optimal control #Passivation
Mechanical properties of thin films from the load deflection of long clamped plates
Journal of Microelectromechanical Systems - Tập 7 Số 3 - Trang 320-328 - 1998
V. Ziebart, Oliver Paul, U. Münch, J. Schwizer, H. Baltes
Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts
Journal of Microelectromechanical Systems - Tập 10 Số 3 - Trang 347-359 - 2001
Lyndon Scott Stephens, Kevin W. Kelly, S. Simhadri, Andrew McCandless, Efstathios I. Meletis
Electrostatic Comb Drive Levitation And Control Method
Journal of Microelectromechanical Systems - Tập 1 Số 4 - Trang 170-178 - 1992
William C. Tang, Martin Lim, Roger T. Howe
Direct silicon-silicon bonding by electromagnetic induction heating
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 285-292 - 2002
K. Thompson, Y.B. Gianchandani, J. Booske, R.F. Cooper
A novel heating technique, electromagnetic induction heating (EMIH), uses electromagnetic radiation, ranging in frequency from a few megahertz to tens of gigahertz, to volumetrically heat silicon above 1000/spl deg/C in only a few seconds. Typical power requirements fall between 900 to 1300 W for silicon wafers 75 to 100 mm in diameter. This technique has successfully produced direct silicon wafer... hiện toàn bộ
#Electromagnetic induction #Electromagnetic heating #Electromagnetic radiation #Wafer bonding #Temperature #Frequency #Silicon on insulator technology #Manufacturing #Bonding processes #Furnaces
Deformation and structural stability of layered plate microstructures subjected to thermal loading
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 372-384 - 2002
M.L. Dunn, Y. Zhang, V.M. Bright
We study the deformation and stability of gold-polysilicon MEMS plate microstructures fabricated by the MUMPS surface micromachining process and subjected to uniform temperature changes. We measured, using an interferometric microscope, full-field deformed shapes of a series of square and circular gold (0.5 /spl mu/m thick)/polysilicon (1.5 /spl mu/m thick) plate microstructures with characteristi... hiện toàn bộ
#Structural engineering #Microstructure #Thermal loading #Temperature #Shape measurement #Thermoelasticity #Bifurcation #Stability #Micromechanical devices #Micromachining
Single mask, large force, and large displacement electrostatic linear inchworm motors
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 330-336 - 2002
R. Yeh, S. Hollar, K.S.J. Pister
We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that operate with moderate to high voltages. The inchworm motor design decouples actuator force from total travel and allows the use of electrostatic gap-closing actuators to achieve large force and large displacement while consuming low power. A typical inchworm motor measures 3 mm /spl times/... hiện toàn bộ
#Electrostatic actuators #Energy efficiency #Micromechanical devices #Thermal force #Voltage #Piezoelectric actuators #Micromotors #Silicon on insulator technology #Electrostatic measurements #Medical services
A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 309-316 - 2002
S. Chen, T.V. Baughn, Z.J. Yao, C.L. Goldsmith
A new method is described to measure the in situ residual stress state in a thin fixed-fixed beam structure used in microelectromechanical systems (MEMS). The methodology can be applied to devices at the anticipated operational and environmental temperatures. The new technique makes use of differences in the thermal expansion coefficient between the thin beam and the substrate. The residual stress... hiện toàn bộ
#Residual stresses #Stress measurement #Micromechanical devices #Temperature #Radio frequency #Microelectromechanical systems #Thermal expansion #Thermal stresses #Finite element methods #Topology
Electrostatic actuation of microscale liquid-metal droplets
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 302-308 - 2002
L. Latorre, Joonwon Kim, Junghoon Lee, P.-P. de Guzman, H.J. Lee, P. Nouet, Chang-Jin Kim
This paper reports sliding of micro liquid-metal droplets by electrostatic actuation for MEMS applications, bi-stable switching in particular. Basic theory concerning droplets on a plane solid surface is exposed followed by experimental study. Being a major parameter in the modeling of sliding droplets, the contact angle has been characterized in the case of mercury on an oxidized silicon wafer. T... hiện toàn bộ
#Electrostatic actuators #Optical microscopy #Finite element methods #Micromechanical devices #Solids #Semiconductor device modeling #Silicon #Optical bistability #Laser modes #Laser theory
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