Journal of Microelectromechanical Systems

Công bố khoa học tiêu biểu

* Dữ liệu chỉ mang tính chất tham khảo

Sắp xếp:  
Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 317-321 - 2002
R.J. Grow, S.C. Minne, S.R. Manalis, C.F. Quate
#Silicon #Atomic force microscopy #Springs #Etching #High-resolution imaging #Semiconductor thin films #Sputtering #Substrates #Scanning electron microscopy #Noise measurement
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 385-401 - 2002
M.J. de Boer, J.G.E. Gardeniers, H.V. Jansen, E. Smulders, M.-J. Gilde, G. Roelofs, J.N. Sasserath, M. Elwenspoek
#Plasma temperature #Guidelines #Etching #Silicon #Micromechanical devices #Plasma applications #Cryogenics #Kinetic energy #Optimal control #Passivation
Mechanical properties of thin films from the load deflection of long clamped plates
Journal of Microelectromechanical Systems - Tập 7 Số 3 - Trang 320-328 - 1998
V. Ziebart, Oliver Paul, U. Münch, J. Schwizer, H. Baltes
Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts
Journal of Microelectromechanical Systems - Tập 10 Số 3 - Trang 347-359 - 2001
Lyndon Scott Stephens, Kevin W. Kelly, S. Simhadri, Andrew McCandless, Efstathios I. Meletis
Electrostatic Comb Drive Levitation And Control Method
Journal of Microelectromechanical Systems - Tập 1 Số 4 - Trang 170-178 - 1992
William C. Tang, Martin Lim, Roger T. Howe
Direct silicon-silicon bonding by electromagnetic induction heating
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 285-292 - 2002
K. Thompson, Y.B. Gianchandani, J. Booske, R.F. Cooper
#Electromagnetic induction #Electromagnetic heating #Electromagnetic radiation #Wafer bonding #Temperature #Frequency #Silicon on insulator technology #Manufacturing #Bonding processes #Furnaces
Deformation and structural stability of layered plate microstructures subjected to thermal loading
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 372-384 - 2002
M.L. Dunn, Y. Zhang, V.M. Bright
#Structural engineering #Microstructure #Thermal loading #Temperature #Shape measurement #Thermoelasticity #Bifurcation #Stability #Micromechanical devices #Micromachining
Single mask, large force, and large displacement electrostatic linear inchworm motors
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 330-336 - 2002
R. Yeh, S. Hollar, K.S.J. Pister
#Electrostatic actuators #Energy efficiency #Micromechanical devices #Thermal force #Voltage #Piezoelectric actuators #Micromotors #Silicon on insulator technology #Electrostatic measurements #Medical services
A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structure
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 309-316 - 2002
S. Chen, T.V. Baughn, Z.J. Yao, C.L. Goldsmith
#Residual stresses #Stress measurement #Micromechanical devices #Temperature #Radio frequency #Microelectromechanical systems #Thermal expansion #Thermal stresses #Finite element methods #Topology
Electrostatic actuation of microscale liquid-metal droplets
Journal of Microelectromechanical Systems - Tập 11 Số 4 - Trang 302-308 - 2002
L. Latorre, Joonwon Kim, Junghoon Lee, P.-P. de Guzman, H.J. Lee, P. Nouet, Chang-Jin Kim
#Electrostatic actuators #Optical microscopy #Finite element methods #Micromechanical devices #Solids #Semiconductor device modeling #Silicon #Optical bistability #Laser modes #Laser theory
Tổng số: 51   
  • 1
  • 2
  • 3
  • 4
  • 5
  • 6