Mechanical property evaluation and failure analysis of cantilevered LIGA nickel microposts

robert, 1997, Structural and mechanical properties of electroplated nickel used in LIGA technique

sharpe jr, 1998, round-robin tests of modulus and strength of polysilicon, Proc MRS Symposium, 518, 57, 10.1557/PROC-518-57

johnson, 1999, materials characterization for mems—a comparison of uniaxial and bending tests, Proc SPIE Micromachining and Microfabrication Process Technology, 3874

sharpe jr, 1996, new test structures and techniques for measurement of mechanical properties of mems materials, Proc SPIE, 2880, 10.1117/12.250969

10.1016/0167-9317(86)90004-3

maner, 1988, mass production of microdevices with extreme aspect ratios by electroforming, Plat Surface Finish, 60

bley, 1991, application of the liga process in fabrication of three-dimensional mechanical microstructures, Proc Microprocess International Microprocess Conf 91, 384

10.1002/masy.19890240125

10.1117/12.221272

young, 1989, Roark s Formulas for Stress &amp Strain

sharpe jr, 1997, mechanical testing of thicker mem's materials, ASME DSC Microelectromechan Syst, 62 htd 354, 93

kelly, 0, Fabrication and Performance of a Liga Heat Exchanger for Gas Turbine Blade Cooling

10.1007/s005420050044

10.1557/PROC-518-185

10.1557/PROC-518-173

10.1557/PROC-546-121

10.1109/84.896772

10.1109/84.925751

10.1115/1.2801214

roark, 1938, the influence of form and scale on strength, Univ Wisconsin Exp Statist Bull, 84

greek, 1998, young's modulus, yield strength and fracture strength of microelements determined by tensile testing, Proc MRS Symposium, 518, 51, 10.1557/PROC-518-51

1985, Metals Handbook

10.1117/12.324092

10.1109/SENSOR.1997.613724

10.1007/s005420050176

10.1117/12.221272