Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials
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Temperature dependences of fibre-optical sensors of mechanical values
Tập 1 - Trang 3 pp. - 2002
In the work the temperature dependences of the fibre-optical sensor of
mechanical values are explored. The examinations of influence of temperature
changes on the transmitting characteristic of FOS were spend. As a sensing
device the silicon membrane with width h1=40 micron with strong centre by width
h3=200 micron was used. The measuring were spend at temperatures T1=20/spl
deg/C, T2=60/spl deg/C...
#Temperature sensors #Temperature dependence #Optical fiber sensors #Mechanical sensors #Sensor phenomena and characterization #Face detection #Silicon #Optical sensors #Diodes #Sensor systems and applications
IEEE 2002 Siberian Russian Workshop on Electron Devices and Materials Proceedings [front matter]
Tập 2 - Trang i-104 - 2002
Conference proceedings front matter may contain various advertisements, welcome
messages, committee or program information, and other miscellaneous conference
information. This may in some cases also include the cover art, table of
contents, copyright statements, title-page or half title-pages, blank pages,
venue maps or other general information relating to the conference that was part
of the ori...
The model of the thermoisolated area of the thermoresistive transducer
Tập 1 - Trang 3 pp. - 2002
The physics processes that take place in the multifunctional thermoresistive
transducer were considered. For presented processes it was proposed to
synthesize the structures based on principles of the quasianalog modeling and to
use these structures for the theoretical model for the determination of the
deformations in the base sensitive element of the transducer, solution the
equation of the stab...
#Thermoresistivity #Transducers #Micromechanical devices #Temperature sensors #Thermal stability #Dielectric substrates #Resistors #Heating #Physics #Humans
Index of authors
Tập 2 - Trang 105-105 - 2002
Presents an index of the authors whose papers are published in the conference.
Losing of the chemically active particles in plasma CF/sub 2/Cl/sub 2//O/sub 2/
Tập 1 - Trang 2 pp. - 2002
The research of the process of plasma etching of silicon in plasma CF/sub
2/Cl/sub 2/>/O/sub 2/ is carried out with the equipment of "Plasma-600". The
covering of quartz walls of the reactor with fluorine polymer results in
increasing the speed of etching. The increasing of the concentration of
chemically active particles (CAP) observed in experiment, testifies to
decreasing the probability of des...
#Chemicals #Plasma chemistry #Plasma applications #Inductors #Etching #Polymers #Silicon #Plasma temperature #Testing #Equations
Prospects of using Si/CaF/sub 2/ structures in pressure sensors
Tập 1 - Trang 2 pp. - 2002
The present work examines Si/CaF/sub 2/ structures. Comparative analysis of
existing structures of membrane tensoresistive sensors has shown the main
obstacle in their developing: a problem of thickness control and reproducibility
of an elastic element. It causes large diversity of strain sensor parameters,
affects their sensitivity and linear range of transformation. However, SOF
structures are v...
#Silicon #Biomembranes #Lattices #Calcium #Capacitive sensors #Sensor phenomena and characterization #Mechanical sensors #Reproducibility of results #Microelectronics #Temperature sensors
Surface structure and optical properties of Ti-diffused LiNbO/sub 3/ waveguides
Tập 1 - Trang 2 pp. - 2002
The topmost surface of crystal during Ti-indiffused LiNbO/sub 3/ waveguide
preparation was studied using atomic force microscopy and high energy electron
diffraction. The formation of the flat terraces with height step /spl sim/0.24nm
as a result of high temperature annealing has been detected. The global changing
of surface morphology induced by Ti diffusing was observed. No new phase
formation o...
#Surface structures #Optical surface waves #Surface morphology #Optical waveguides #Atomic force microscopy #Atom optics #Electron optics #Surface waves #Electron microscopy #Optical diffraction
X-ray spectroscopic study of carbon produced at destruction of field cathodes from carbon nanotubes
Tập 1 - Trang 2 pp. - 2002
The opportunity for measurement of X-ray spectra with the help of carbon
nanotubes cathode was realized. The K/spl alpha/-spectra of the carbon, which
was transferred on the copper anode as a result of field emission from cathodes
containing multiwall and single-wall carbon nanotubes, was obtained. The carbon
materials were found to consist from graphite-like particles. The spectrum of
carbon mate...
#Spectroscopy #Cathodes #Carbon nanotubes #Carbon dioxide #Anodes #X-ray imaging #Copper #Electrons #Dielectric materials #Fasteners
Characterization of etched tracks and nanotubules by ion transmission spectrometry
Tập 1 - Trang 4 pp. - 2002
Etched tracks have recently come into the focus of renewed interest, as it has
turned out that they have a great future application potential. Therefore it is
worthwhile to review the techniques for ion track characterization. Especially,
ion transmission spectrometry (ITS) has recently emerged as a new tool for the
rapid characterization of both the average diameter and the shape of etched
tracks...
#Etching #Spectroscopy #Particle beams #Target tracking #Particle beam measurements #Physics #Scanning electron microscopy #Particle measurements #Polymers #Solid state circuits
Micromechanical thermal converter of power alternating current
Tập 1 - Trang 3 pp. - 2002
The microconverter construction and its fabrication process route designed. The
approaching technological materials are selected. The heat fluxes and electrical
performances simulations of the device are worked out. All fabrication
operations, according to a process route are developed. Experimental samples are
explored and results compared with a performance of secondary etalon. On the
basis of o...
#Micromechanical devices #Thermoelectricity #Resistance heating #Voltage #Thermal resistance #Thermal conductivity #Electric variables measurement #Wire #Manufacturing processes #Mechanical sensors