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Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials

 

 

 

 

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Các bài báo tiêu biểu

Temperature dependences of fibre-optical sensors of mechanical values
Tập 1 - Trang 3 pp. - 2002
A.D. Bialik, I.A. Voronin, A.M. Zlobin
In the work the temperature dependences of the fibre-optical sensor of mechanical values are explored. The examinations of influence of temperature changes on the transmitting characteristic of FOS were spend. As a sensing device the silicon membrane with width h1=40 micron with strong centre by width h3=200 micron was used. The measuring were spend at temperatures T1=20/spl deg/C, T2=60/spl deg/C... hiện toàn bộ
#Temperature sensors #Temperature dependence #Optical fiber sensors #Mechanical sensors #Sensor phenomena and characterization #Face detection #Silicon #Optical sensors #Diodes #Sensor systems and applications
Experimental research of silicon flowmeters based on piezoresistance effect
Tập 1 - Trang 3 pp. - 2002
V.A. Kolchuzhin, A.V. Nazin, A.V. Shaporin
The experimental results are presented for silicon flowmeter in a range of gas range 20 - 1000 1/h.
#Silicon #Piezoresistance #Piezoresistive devices #Bridge circuits #Pollution measurement #Resistors #Temperature dependence #Temperature distribution #Semiconductor device measurement #Heating
The model of the thermoisolated area of the thermoresistive transducer
Tập 1 - Trang 3 pp. - 2002
S.N. Osinov
The physics processes that take place in the multifunctional thermoresistive transducer were considered. For presented processes it was proposed to synthesize the structures based on principles of the quasianalog modeling and to use these structures for the theoretical model for the determination of the deformations in the base sensitive element of the transducer, solution the equation of the stab... hiện toàn bộ
#Thermoresistivity #Transducers #Micromechanical devices #Temperature sensors #Thermal stability #Dielectric substrates #Resistors #Heating #Physics #Humans
Losing of the chemically active particles in plasma CF/sub 2/Cl/sub 2//O/sub 2/
Tập 1 - Trang 2 pp. - 2002
B.K. Bogomolov
The research of the process of plasma etching of silicon in plasma CF/sub 2/Cl/sub 2/>/O/sub 2/ is carried out with the equipment of "Plasma-600". The covering of quartz walls of the reactor with fluorine polymer results in increasing the speed of etching. The increasing of the concentration of chemically active particles (CAP) observed in experiment, testifies to decreasing the probability of des... hiện toàn bộ
#Chemicals #Plasma chemistry #Plasma applications #Inductors #Etching #Polymers #Silicon #Plasma temperature #Testing #Equations
Features of anisotropic etching of silicon
Tập 1 - Trang 2 pp. - 2002
R.P. Dikareva, A.V. Kamenskaja, D.A. Langueva, S.V. Zaozyornova
The purpose of our work is to research of the process of AE of Si plates with orientation {100} and {110}, and also consideration of dynamics of change of the etched figure's form, dependence on their form of a concrete mask, dependence of speeds of etching on concentration etchant and its temperatures. Experimental results compared to results of modeling with the purpose of a correcting the progr... hiện toàn bộ
#Anisotropic magnetoresistance #Etching #Silicon #Spirals #Temperature dependence #Water heating #Microelectronics #Chemicals #Concrete #Laboratories
Cấu trúc và hiện thực hóa mạch của cảm biến áp suất-nhiệt độ kết hợp dựa trên hiệu ứng piezoresistive cắt Dịch bởi AI
Tập 1 - Trang 5 pp. - 2002
A.V. Limorev, A.V. Gridchin
Bài báo này phát triển và trình bày về cấu trúc và hiện thực hóa mạch của cảm biến áp suất-nhiệt độ kết hợp dựa trên hiệu ứng piezoresistive cắt (SPE). Cảm biến silicon bốn cực (FTT) được sử dụng làm yếu tố nhạy cảm chính. Cấu trúc của cảm biến cho phép đo đạt yêu cầu huyết áp, nhiệt độ cơ thể và nhịp tim. Mạch của cảm biến này cho phép đo các thông số này với độ chính xác tốt. Đầu ra kỹ thuật số ... hiện toàn bộ
#Temperature sensors #Piezoresistance #Silicon #Bridge circuits #Stress #Water heating #Pulse measurements #Sensor phenomena and characterization #Topology #Surface resistance
The investigation of main characteristics of membrane thermal sensors based on silicon
Tập 1 - Trang 3 pp. - 2002
T.A. Apasova, O.V. Lobach, M.V. Popova, A.A. Poplavnoy
The silicon thermoelectrical sensor measuring small heat flows has been designed. The first test party has been fabricated. Sensor test methods have been developed and carried out, topology defects have been reveal. Output characteristics of the sensor have been received.
#Biomembranes #Sensor phenomena and characterization #Thermal sensors #Silicon #Testing #Temperature sensors #Thermal resistance #Fluid flow measurement #Voltage #Topology
The 3D-model of anisotropic conductivity in the strained n-silicon
Tập 1 - Trang 3 pp. - 2002
A.A. Konovalov, E.A. Makarov
In paper the outcomes of 3-dimensional simulation of an anisotropic electrical conductivity originating at deformation of n-silicon are reduced. Is shown, that the application of the space 19-dot template of digitization allows to take into account changes x-, y-, and z-components of field strength in all three space directions. As an example the dependences of an output voltage transversal sensor... hiện toàn bộ
#Anisotropic magnetoresistance #Conductivity #Tensile stress #Laplace equations #Silicon #Tellurium #Voltage #Mechanical sensors #Couplings #Effective mass
X-ray spectroscopic study of carbon produced at destruction of field cathodes from carbon nanotubes
Tập 1 - Trang 2 pp. - 2002
A.V. Gusel'nikhov, P.A. Pruss, A.V. Okotrub
The opportunity for measurement of X-ray spectra with the help of carbon nanotubes cathode was realized. The K/spl alpha/-spectra of the carbon, which was transferred on the copper anode as a result of field emission from cathodes containing multiwall and single-wall carbon nanotubes, was obtained. The carbon materials were found to consist from graphite-like particles. The spectrum of carbon mate... hiện toàn bộ
#Spectroscopy #Cathodes #Carbon nanotubes #Carbon dioxide #Anodes #X-ray imaging #Copper #Electrons #Dielectric materials #Fasteners
Index of authors
Tập 2 - Trang 105-105 - 2002
Presents an index of the authors whose papers are published in the conference.