Design and optimization of the thermovision microscope

A.S. Larshin1
1Novosibirsk State Technical University, Novosibirsk, Russia

Tóm tắt

Application of a receiving device on basis InAs, for a thermovision microscopy is studied. The device designed and made in an ISP of the Siberian Branch of the Russian Academy of Science, fundamental parameters: dimensionality 128/spl times/128, a step 50 microns, a range of lengths of waves 2.5-3 microns. For decrease of a background radiation from warm parts of a case of the device it is offered to use a spherical mirror. The radius and a position of a mirror are calculated so that the matrix of a receiving device "saw" only cold (that is - not radiating) parts of a cryostat. Tests have shown its sufficient effectiveness. The background radiation has decreased in 15 times. It has allowed increasing integration time in 9 times and a temperature solution in 8 times. The spatial solution which has made 7 microns is measured. Mathematical handling allows improving this value up to /spl sim/ 4 microns.

Từ khóa

#Design optimization #Mirrors #Semiconductor devices #Testing #Temperature distribution #Cameras #Optical microscopy #Semiconductor device measurement #Thermal expansion #Optical imaging

Tài liệu tham khảo

poljakova, 1969, J Microscop grigor'eva, 1991, Physical quantities the hand-book ovsjuk, 2001, Matrix receiving devices of an infrared range, 10