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Ring-Related Defects in MCZ Wafer Comparison by Electrical, Structural, and Device Properties
Springer Science and Business Media LLC - Tập 469 - Trang 119-124 - 1997
F. González, M. McQueen, R. Barbour, G. A. Rozgonyi
Thermal cycles in advanced CMOS processing can nucleate an annular ring of oxygen precipitate-induced stacking faults (OSF-ring) via activation of bulk nuclei grown-in during the crystal pulling process. Because the OSF-ring can adversely affect device characteristics, it is important that substrates with OSF-ring characteristics be detected early in the process. Results are presented in this pape...... hiện toàn bộ
Photoemission Study of the a-Si-H/a-SiOx:H and a-Si:H/a-SiN:H Interface Formation
Springer Science and Business Media LLC - Tập 77 - Trang 647-652 - 2011
W. Eberhardt, B. Abeles, L. Yang, H. Stasiewski, D. Sondericker
We report a study of the interface formation between a-Si:H and a-SiOx:H or a-SiN:H in the coverage regime from a submonolayer to a few layers. The films were grown by plasma assisted CVD and characterized by photoemission. Our studies show that the growth mechanism is different for a-SiOx:H on a-Si:H than for a-Si:H on a a-Si:Ox:H. The growth of the a-SiNx:H/a-Si:H interface on the other hand is ...... hiện toàn bộ
Molecular Dynamics Simulations of Nanoindentation of Silicon Nitride
Springer Science and Business Media LLC - Tập 539 - 1998
Philip Walsh, Andrey Omeltchenko, Hideaki Kikuchi, Rajiv K. Kalia, Aiichiro Nakano, Priya Vashishta
AbstractThis is a report of work in progress on 10 million atom Molecular Dynamics (MD) simulations of nanoindentation of crystalline and amorphous silicon nitride (Si3N4). Nanoindentation is used to determine mechanical properties of extremely thin films such as hardness and elastic moduli. We report load-displacement curv...... hiện toàn bộ
Porous Thin-Film Anode Materials for Solid-Oxide fuel Cells
Springer Science and Business Media LLC - Tập 575 - Trang 321-324 - 1999
Jeffrey D. Morse, Robert T. Graff, Jeffrey P. Hayes, Alan F. Jankowski
Thin film, solid-oxide fuel cells (TFSOFCs) synthesized from an electrolyte and conductive material are developed using photolithographic patterning and physical vapor deposition. The anode layer must enable combination of the reactive gases, be conductive to pass the electric current, and provide mechanical support to the electrolyte and cathode layers. The microstructure and morphology desired f...... hiện toàn bộ
Temperature Dependent Micro-Raman Scattering of Sr0.35Ba0.65TiO3 Film Grown by Pulsed Laser Deposition
Springer Science and Business Media LLC - Tập 401 - Trang 177-182 - 2011
Sampriti Sen, E. Ching-Prado, A. Reynés-Figueroa, R. S. Katiyar, J. S. Horwitz, L. A. Knauss
A film of Sr0.35Ba0.65TiO3 (SBT) has been grown in situ by pulsed laser deposition on (001) LaAlO3 single crystal. From X-ray diffraction studies the sample is found to be in single phase and well oriented. Raman spectrum of the SBT film shows bands around 178, 219, 296, 513, 571 and 741 cm”. The spectrum is similar to that found in SBT ceramic material, but the frequencies of the phonons are shif...... hiện toàn bộ
Materials Processing through Levitation in High Gas Pressure
Springer Science and Business Media LLC - Tập 251 - Trang 47-51 - 1991
Makoto Nanko, K. Ishizaki
New levitation materials processing on the ground was developed using high gas pressure. Conventional levitation materials processes are carried out in microgravity fields, such as in space or in free-falling, or by applying aerodynamic force, electromagnetic force etc.. This innovated method is based on buoyancy by very high density of high pressure gas. Advantages of this new method are not only...... hiện toàn bộ
A New Role for Engineering Educators: Managing for Team Success
Springer Science and Business Media LLC - Tập 632 - 2000
Debra Larson
ABSTRACTFor a variety of reasons, collaborative learning teams, project teams or design teams are now a part of undergraduate engineering education. In response, the current education-related literature is flourishing with team-type topics that include when and why teams, team dynamics, and how to structure teams. Almost non-existent, however, are discussions about...... hiện toàn bộ
Influence of Deposition Parameters on the Morphology of CdTe Films and on the Performance of CdTe Solar Cells
Springer Science and Business Media LLC - Tập 1012 - Trang 1-6 - 2007
Mathias Hädrich, Sebastian Mack, Heinrich Metzner, Udo Reislöhner, Wolfgang Witthuhn
For industrial CdTe solar cell production, thin, dense and pinhole-free films have to be deposited at high rates. Using a close-to-industrial close space sublimation (CSS) process, we deposited CdTe films at different temperatures and rates. The morphology of these films was analyzed by scanning electron microscopy (SEM) and x-ray diffraction (XRD). The measurements show the size, size distributio...... hiện toàn bộ
The Chemistry of Oxygen in Silicon
Springer Science and Business Media LLC - - 1984
J. C. Mikkelsen
ABSTRACTSome of the key issues involving the chemistry of oxygen in silicon crystals are presented in this paper. The incorporation of oxygen into Czochralski-grown ingots from melt contact with silica crucibles is described in the context of the Si-SiO2 phase diagram. The techniques for characterizing oxygen in silicon are reviewed, with an em...... hiện toàn bộ
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