Electric Field Direct Force in Electromigration Mechanism

Springer Science and Business Media LLC - Tập 516 - 1998
А. А. Карпушин1, A. V. Sorokin1, M. R. Baklanov2, Karen Maex2
1Institute of Semiconductor Physics SB RAS, 630090 Novosibirsk, Russia
2IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

Tóm tắt

AbstractThe direct influence of the applied electric field on ions of lattice, as a whole, was considered. This influence induces the strains and stresses and its gradients. In turn, this additional stresses may induce the vacancy (ion) diffusion flux. It is shown that this flux coincides in the direction and is comparable in magnitude with the electromigration flux induced by the electron wind.

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Tài liệu tham khảo

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Springer Science and Business Media LLC

Tập 516

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