X-Ray Scattering Studies of Thin Films and Multilayers

Springer Science and Business Media LLC - Tập 151 - Trang 231-242 - 2012
G. S. Cargill1
1IBM Research Division, T.J. Watson Research Center, Yorktown Hts., USA

Tóm tắt

X-ray scattering experiments provide important information about the atomic scale structure and the microstructure of thin films and multilayers. The high intensity, brightness, and broad energy spectrum of synchrotron radiation greatly extend capabilities of scattering experiments, particularly for scattering from ultrathin films and for anomalous dispersion scattering from alloys. Examples of scattering studies of both crystalline and amorphous materials are given in this overview.

Tài liệu tham khảo

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