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Comparison of EUV Photomask Metrology Between CD-AFM and TEM
Springer Science and Business Media LLC - Tập 5 - Trang 91-100 - 2022
Gaoliang Dai, Kai Hahm, Lipfert Sebastian, Markus Heidelmann
Accurate metrology of extreme ultraviolet (EUV) photomask is a crucial task. In this paper, two different methods for reference EUV photomask metrology are compared. One is the critical dimension atomic force microscopy (CD-AFM). In the measurements, the contribution of its AFM tip geometry is usually the dominant error source, as measured AFM images are the dilated results of measured structures ...... hiện toàn bộ
Capillary Performance of Nanoporous Aluminum Braided Wicks Prepared by Anodic Oxidation
Springer Science and Business Media LLC - Tập 5 - Trang 370-380 - 2022
Fei Gao, Longsheng Lu, Xiaokang Mei, Yu-Xiang Yu, Shitong Chai, Yang Shen, Yingxi Xie
With the rapid development of two-phase heat exchangers, the further improvement of the capillary performance of their internal wick faces a great challenge. As an important technology in the surface treatment of aluminum alloys, anodic oxidation has been widely used to develop various functional nanostructures. In this study, nanopores with diameters of 30–40 nm were fabricated on the surface of ...... hiện toàn bộ
Correction: A Proposal of a Spline Filter that Achieves Both Robustness and Lower Compatibility
Springer Science and Business Media LLC - Tập 5 - Trang 441-441 - 2022
Yuki Kondo, Munetoshi Numada, Keiya Takahashi, Ichiro Yoshida, Hiroyasu Koshimizu
Study on Mechanisms of Photon-Induced Material Removal on Silicon at Atomic and Close-to-Atomic Scale
Springer Science and Business Media LLC - Tập 4 Số 4 - Trang 216-225 - 2021
Peizhi Wang, Jinshi Wang, Fengzhou Fang
AbstractThis paper presents a new approach for material removal on silicon at atomic and close-to-atomic scale assisted by photons. The corresponding mechanisms are also investigated. The proposed approach consists of two sequential steps: surface modification and photon irradiation. The back bonds of silicon atoms are first weakened by the chemisorption of chlorin...... hiện toàn bộ
Reinforcement of TiB2 Nanoparticles in Aluminium Piston Alloys for High Performance at Elevated Temperature
Springer Science and Business Media LLC - Tập 1 - Trang 248-251 - 2018
Yijie Zhang, Sajjad Amirkhanlou, Shouxun Ji
Nano-TiB2 particles produced by in situ approaches were employed to reinforce the Mahle 174 piston alloy. Experimental results showed that, with TiB2 nanoparticles, the mechanical properties were significantly improved at ambient and elevated temperatures. The ultimate tensile property at room temperature was increased from 250 to 332 MPa. The ultimate tensile property at 300 °C was increased from...... hiện toàn bộ
Finite Element Investigation of the Influence of SiC Particle Distribution on Diamond Cutting of SiCp/Al Composites
Springer Science and Business Media LLC - Tập 3 - Trang 251-259 - 2020
Shijin Lu, Zengqiang Li, Junjie Zhang, Jianguo Zhang, Xiaohui Wang, Yongda Yan, Tao Sun
Characteristics of internal microstructures have a strong impact on the properties of particulate reinforced metal composites. In the present work, we perform finite element simulations to elucidate fundamental mechanisms involved in the ultra-precision orthogonal cutting of aluminum-based silicon carbide composites (SiCp/Al), with an emphasis on the influence of particle distribution characterist...... hiện toàn bộ
Automatic Measurement of Silicon Lattice Spacings in High-Resolution Transmission Electron Microscopy Images Through 2D Discrete Fourier Transform and Inverse Discrete Fourier Transform
Springer Science and Business Media LLC - Tập 5 - Trang 119-126 - 2022
Fang Wang, Yushu Shi, Shu Zhang, Xixi Yu, Wei Li
Line width (i.e., critical dimension, CD) is a crucial parameter in integrated circuits. To accurately control the CD in manufacturing, a reasonable CD measurement algorithm is required. We develop an automatic and accurate method based on a two-dimensional discrete Fourier transform for measuring the lattice spacings from high-resolution transmission electron microscopy images. Through the two-di...... hiện toàn bộ
Carbon Dot-Modified TiO2@SiO2 Aerogel as an Anode for Lithium-Ion Batteries
Springer Science and Business Media LLC - Tập 6 Số 1 - 2023
Zanyu Chen, Jiugang Hu, Kejian Ding, Jun Tan, Hongshuai Hou, Xiaobo Ji
AbstractTitanium oxides have been considered promising anode materials for lithium-ion batteries (LIBs). However, the poor conductivity and low specific capacity of bulk titanium oxides limit their application. In this study, a carbon dot-modified TiO2@SiO2 aerogel was successfully fabricated through a facile ambient pressu...... hiện toàn bộ
A Finite Element Modeling Prediction in High Precision Milling Process of Aluminum 6082-T6
Springer Science and Business Media LLC - Tập 1 - Trang 236-247 - 2018
A. Davoudinejad, S. Doagou-Rad, G. Tosello
This study investigates micro-end-milling machining prediction using three-dimensional finite element modeling method. The FE model was developed for contouring up-milling operation for prediction of chip flow, burr formation, cutting temperature and cutting forces in an integrated model. The flow stress behavior of the workpiece was modeled by the Johnson–Cook material constitutive model. Differe...... hiện toàn bộ
Correction: Design and Development of Oblique-Incident Interferometer for Form Measurement of Hand-Scraped Surfaces
Springer Science and Business Media LLC - Tập 5 - Trang 432-432 - 2022
So Ito, Daiki Kameoka, Kimihisa Matsumoto, Kazuhide Kamiya
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