Cutting-Based Single Atomic Layer Removal Mechanism of Monocrystalline Copper: Atomic Sizing Effect

Fang FZ (2016) Atomic and close-to-atomic scale manufacturing—a trend in manufacturing development. Front Mech Eng 11(4):325–327

Fang FZ, Zhang N, Guo D, Ehmann K, Cheung B, Liu K, Yamamura K (2019) Towards atomic and close-to-atomic scale manufacturing. Int J Extreme Manuf 1:012001–012033

Pierre M, Wacquez R, Jehl X, Sanquer M, Vinet M, Cueto O (2010) Single-donor ionization energies in a nanoscale CMOS channel. Nat Nanotechnol 5(2):133

Zhao M, Yu Y, Yimo H, Yang X, Zhu H, Wang S, Wang Y, Muller DA, Zhang X (2016) Large-scale chemical assembly of atomically thin transistors and circuits. Nat Nanotechnol 11(11):954

Koch M, Keizer JG, Pakkiam P, Keith D, House MG, Peretz E, Simmons MY (2019) Spin read-out in atomic qubits in an all-epitaxial three-dimensional transistor. Nat Nanotechnol 14(2):137

Fang FZ, Xu FF (2018) Recent advances in micro/nano-cutting: effect of tool edge and material properties. Nanomanuf Metrol 1:4–31

Komanduri R, Von Turkovich BF (1981) New observations on the mechanism of chip formation when machining titanium alloys. Wear 69(2):179–188

Xie JQ, Bayoumi AE, Zbib HM (1995) Analytical and experimental study of shear localization in chip formation in orthogonal machining. J Mater Eng Perform 4(1):32–39

Fang FZ, Wu H, Zhou W, Hu XT (2007) A study on mechanism of nano-cutting single crystal silicon. J Mater Process Technol 184(1–3):407–410

Fang FZ, Wu H, Liu YC (2005) Modelling and experimental investigation on nanometric cutting of monocrystalline silicon. Int J Mach Tools Manuf 45(15):1681–1686

Xu F, Wang J, Fang FZ, Zhang X (2017) A study on the tool edge geometry effect on nano-cutting. Int J Adv Manuf Technol 91(5–8):2787–2797

Yan J, Zhao H, Kuriyagawa T (2009) Effects of tool edge radius on ductile machining of silicon: an investigation by FEM. Semicond Sci Technol 24(7):075018

Plimpton S (1995) Fast parallel algorithms for short-range molecular dynamics. J Comput Phys 117:1–19

Zhu PZ, Fang FZ (2016) Study of the minimum depth of material removal in nanoscale mechanical machining of single crystalline copper. Comput Mater Sci 118:192–202

Foiles SM, Baskes MI, Murray SD (1986) Embedded-atom-method functions for the FCC metals Cu, Ag, Au, Ni, Pd, Pt, and their alloys. Phys Rev B 33(12):7983

Girifalco LA, Victor GW (1959) Application of the Morse potential function to cubic metals. Phys Rev 114(3):687