Thermal sensors based on the seebeck effectSensors and Actuators - Tập 10 - Trang 321 - 1986
Van Herwaarden A.W., Sarro P.M.
The thermoelectric effects in metals and semiconductors are reviewed and particular attention is devoted to the Seebeck effect in silicon and its possible exploitation for thermal sensing. For this purpose, an analysis of the performance of integrated silicon thermopiles is presented. Several thermal sensors that measure magnetic, mechanical, radiation and chemical signals, as well as electrical c...... hiện toàn bộ