SENSORS, 2002 IEEE
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New surface acoustic wave gas sensor of the mass-sensitive type sensitive to the thermal properties of gases
Tập 1 - Trang 372-375 vol.1
The basic principles of a new surface acoustic wave (SAW) gas sensor are described. Being essentially a sensor of the mass-sensitive type, the proposed device possesses certain features of the thermometric SAW sensors and is not only sensitive to the vapors of volatile substances, but capable of detecting gases by their thermal properties as well. This principles consists of making a certain delay......
#Surface acoustic waves #Acoustic waves #Gas detectors #Gases #Temperature sensors #Sensor phenomena and characterization #Thermal sensors #Sensor systems #Surface acoustic wave devices #Acoustic sensors
Silicon micromechanical structures fabricated by electrochemical process
Tập 1 - Trang 575-579 vol.1
Silicon (Si) micromechanical structures were fabricated by means of sacrificial layers defined with porous silicon (PS) and masked by hydrogen ion implantation with adequate thermal annealing. The fabrication process to remove the PS layers with diluted KOH at room temperature does not cause damage in remaining Si microstructures which have less than 1 /spl mu/m thickness controlled by the anodiza......
#Silicon #Micromechanical devices #Electrochemical processes #Hydrogen #Ion implantation #Annealing #Fabrication #Microstructure #Temperature control #Thickness control
Nanostructured TiO/sub 2/ thin films prepared by supersonic beams and their application in a sensor array for the discrimination of VOC
Tập 1 - Trang 647-650 vol.1
In this paper, we present the first sensor ever built using films grown by supersonic beam of cluster oxides as sensing material. Supersonic cluster beams, produced by a pulsed micro-plasma cluster source have successfully used to prepare nanocrystalline thin films of TiO/sub 2/. The sensors, prepared by using different deposition parameters, were suitable for use in a gas sensor array for electro......
#Thin film sensors #Sensor arrays #Valves #Gas detectors #Sputtering #Sensor phenomena and characterization #Electrodes #Helium #Mechanical factors #Nanoscale devices
Energy trapping in mesa-shaped quartz crystal microbalance
Tập 2 - Trang 1154-1159 vol.2
In this paper, the energy trapping problem in AT-cut quartz mesa structures is studied. Results show that the mesa structure is able to trap thickness-shear vibration energy within a much smaller area compared with a conventional electroded plate. The optimum sizes of these mesa structures are obtained through this study.
#Electrodes #Structural beams #Coupled mode analysis #Vibrations #Equations #Power engineering and energy #Motion analysis #Elasticity #Voltage
Ultimate sensing with an ultrathin single crystalline silicon resonator
Tập 2 - Trang 916-921 vol.2
Miniaturization of resonating sensors is a promising method to reduce the thermo-mechanical noise and raise the mass and force sensitivity. Fabrication technique based on SOI (silicon on insulator) wafer was developed for making ultrathin single-crystalline structures down to 20 nm thick. Mechanical quality factor (Q-factor) of the cantilever decreases with decreasing thickness due to the energy d......
#Crystallization #Q factor #Silicon on insulator technology #Mechanical sensors #Thermal sensors #Thermomechanical processes #Noise reduction #Force sensors #Thermal force #Fabrication
Sub-micron range thickness measurements using a novel scanning heterodyne optical interferometer
Tập 2 - Trang 1080-1084 vol.2
Introduces a novel and highly accurate method of thickness measurement using a compact, high performance, scanning heterodyne optical interferometer. The instrument has the potential to measure thickness at an Angstrom resolution over a micron continuous thickness range. The instrument uses acousto-optic devices to implement rapid scanning for thickness measurements of the test medium. As the read......
#Optical interferometry #Thickness measurement #Optical mixing #Optical beams #Laser beams #High speed optical techniques #Optical refraction #Optical variables control #Instruments #Acoustic testing
Detection and sizing of micro bubbles in streaming fluids with ultrasound
Tập 1 - Trang 528-531 vol.1
The detection of micro bubbles in fluids is of great practical interest in many medical and biotechnological applications, particularly with the extracorporeal circulation. A self calibrating system is presented which allows a continuous detection and determination of the micro bubble size distribution of tube flows in a range between 10 and 250 /spl mu/m in diameter. The measuring system is based......
#Ultrasonic imaging #Ultrasonic variables measurement #Size measurement #Application software #Computerized monitoring #Condition monitoring #Heart #Lungs #Research and development #Filters
Development of a novel ultra-fast scintillator with MQW structure
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We propose lead-halide-based perovskite-type organic/inorganic hybrid compounds, e.g. (CH/sub 3/NH/sub 3/)PbBr/sub 3/ and (C/sub 6/H/sub 13/NH/sub 3/)/sub 2/PbI/sub 4/ as a new kind of scintillator to use excitonic luminescence of semiconductor as the signal of radiation detection. Single crystals of the materials were bombarded by an electron pulse (1 to 2 ps) from a linear accelerator and the ti......
#Quantum well devices #Luminescence #Pulse measurements #Lead compounds #Signal detection #Radiation detectors #Crystals #Crystalline materials #Semiconductor materials #Electrons
A high dynamic magnetooptic current transformer with optimized signal processing
Tập 2 - Trang 1354-1359 vol.2
In the power industry current has to be measured for metering and protection purposes. Conventional sensor setups need two transformers to realize the high dynamic range. By a new mixed analog/digital signal processing algorithm, the performances of a high accuracy revenue metering and a fast, high dynamic protection metering magnetooptic current sensor were combined into one single unit. The syst......
#Current transformers #Signal processing #Signal processing algorithms #Power system protection #Magnetic sensors #Dynamic range #Power industry #Current measurement #Power measurement #Digital signal processing
Optical sensor for velocity and slip measurement of automobile belt drives
Tập 2 - Trang 823-828 vol.2
To investigate and optimize the operational behavior of automobile belt drives, it is important to detect unfavorable operating conditions, such as excessive slippage. To measure slippage, the speed of the belt is compared to the peripheral velocities of pulleys in the belt drive. The velocity of the belt is obtained by a contactless optical sensor, whose signals are processed employing correlatio......
#Optical sensors #Velocity measurement #Automobiles #Belts #Optical signal processing #Pulleys #Signal processing #Optical design #Signal design #Optical devices