Plasma sprayed thick film anisotropic magnetoresistive (AMR) sensors
SENSORS, 2002 IEEE - Tập 1 - Trang 656-659 vol.1
Tóm tắt
Reports recent work on thick film permalloy (NiFe) and NiCo alloy anisotropic magnetoresistive sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo alloy sensors. Resistivity of thermal sprayed thick film is 40-60 /spl mu//spl Omega/-cm, which is higher than bulk material. A maximum /spl Delta/R/R value of 5.2% is achieved after thermal annealing. A high /spl Delta/R/R value and low saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.
Từ khóa
#Anisotropic magnetoresistance #Thermal spraying #Thick films #Magnetic sensors #Thick film sensors #Sensor phenomena and characterization #Thermal sensors #Conductivity #Thermal resistance #Magnetic materialsTài liệu tham khảo
10.1016/B978-012174231-7/50062-2
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