Novel optical distance sensor based on MSM technology

SENSORS, 2002 IEEE - Tập 1 - Trang 86-91 vol.1
P. Gulden1, D. Becker1, M. Vossiek1
1Corporate Technology Siemens AG, Munich, Germany

Tóm tắt

This paper describes a novel distance-sensor concept based on photodiodes in metal-semiconductor-metal technology (MSM). MSM photodiodes can be operated as opto-electronic mixers (OEM) functioning similar to the so-called photonic mixing device (PMD). This paper employs the correlation techniques previously used with the PMD to the MSM. First experimental results obtained with the MSM inserted into the authors' standard lab setup previously used for PMD testing are provided Additionally different configurations well suited for mixer operation of the MSM are pointed out. Throughout this paper, the similarities of PMD and MSM are pointed out as well as the key differences.

Từ khóa

#Optical sensors #Voltage #Photodiodes #Optical mixing #Optical modulation #Electrodes #Electrooptic devices #Optical devices #Distance measurement #Anodes

Tài liệu tham khảo

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