Structure and properties of TiN coatings

Hatschek, 1983, American Machinist, Special Rep., 752, 128

Wittmer, 1981, J. Appl. Phys., 52, 5722, 10.1063/1.329512

Nicolet, 1978, Thin Solid Films, 52, 415, 10.1016/0040-6090(78)90184-0

Valkonen, 1983, 401

Karlsson, 1982, Thin Solid Films, 87, 181, 10.1016/0040-6090(82)90273-5

Jacobsson, 1979, Thin Solid Films, 63, 333, 10.1016/0040-6090(79)90037-3

Nakamura, 1977, Thin Solid Films, 40, 155, 10.1016/0040-6090(77)90115-8

Sato, 1978, Thin Solid Films, 54, 61, 10.1016/0040-6090(78)90277-8

Yoshihara, 1979, J. Vac. Sci. Technol., 16, 1007, 10.1116/1.570130

Sundgren, 1983, Thin Solid Films, 105, 367, 10.1016/0040-6090(83)90319-X

Chevallier, 1981

1981, Thin Solid Films, 80, 263, 10.1016/0040-6090(81)90232-7

Matthews, 1980, Thin Solid Films, 73, 367, 10.1016/0040-6090(80)90495-2

Münz, 1981, Vak.-Tech., 30, 78

Sproul, 1983, Thin Solid Films, 107, 141, 10.1016/0040-6090(83)90016-0

Buhl, 1981, Thin Solid Films, 80, 265, 10.1016/0040-6090(81)90233-9

Suri, 1980, Thin Solid Films, 72, 529, 10.1016/0040-6090(80)90543-X

Zega, 1977, Thin Solid Films, 45, 577, 10.1016/0040-6090(77)90249-8

Fleisher, 1979, Thin Solid Films, 63, 347, 10.1016/0040-6090(79)90039-7

Matthews, 1983, 1325

Gabriel, 1983, 1311

Hibbs, 1984, Thin Solid Films, 122, 115, 10.1016/0040-6090(84)90003-8

Johansson, 1985, J. Vac. Sci. Technol. A, 3, 303, 10.1116/1.573255

Noël, 1984, J. Vac. Sci. Technol. A, 2, 284, 10.1116/1.572582

Igasaki, 1978, Jpn. J. Appl. Phys., 17, 85, 10.1143/JJAP.17.85

Igasaki, 1980, Thin Solid Films, 70, 17, 10.1016/0040-6090(80)90407-1

Wittmer, 1982, Thin Solid Films, 93, 397, 10.1016/0040-6090(82)90145-6

Posadowski, 1979, Thin Solid Films, 62, 347, 10.1016/0040-6090(79)90009-9

Ahn, 1983, Thin Solid Films, 107, 45, 10.1016/0040-6090(83)90006-8

Armigliato, 1982, Thin Solid Films, 92, 341, 10.1016/0040-6090(82)90158-4

Garceau, 1979, Thin Solid Films, 60, 237, 10.1016/0040-6090(79)90194-9

Schiller, 1984, Thin Solid Films, 111, 259, 10.1016/0040-6090(84)90147-0

Poitevin, 1982, Thin Solid Films, 97, 69, 10.1016/0040-6090(82)90418-7

Lemperiere, 1984, Thin Solid Films, 111, 339, 10.1016/0040-6090(84)90326-2

von Seefeld, 1980, IEEE Trans. Electron Devices, 27, 873, 10.1109/T-ED.1980.19949

Hibbs, 1983, Thin Solid Films, 107, 149, 10.1016/0040-6090(83)90017-2

Hibbs, 1985, Acta Metall., 33, 797, 10.1016/0001-6160(85)90103-8

Toth, 1971

Ehrlich, 1949, Z. Anorg. Chem., 259, 1, 10.1002/zaac.19492590102

Holmberg, 1962, Acta Chem. Scand., 16, 1255, 10.3891/acta.chem.scand.16-1255

Nagakura, 1975, J. Appl. Crystallogr., 8, 65, 10.1107/S0021889875009545

Mah, 1974, J. Vac. Sci. Technol., 11, 371, 10.1116/1.1318623

Kobayashi, 1978, Thin Solid Films, 54, 67, 10.1016/0040-6090(78)90278-X

Pierson, 1977, Thin Solid Films, 40, 41, 10.1016/0040-6090(77)90101-8

Pan, 1981, Thin Solid Films, 78, 25, 10.1016/0040-6090(81)90414-4

Shikama, 1983, Thin Solid Films, 106, 185, 10.1016/0040-6090(83)90480-7

Sundgren, 1983, Thin Solid Films, 105, 385, 10.1016/0040-6090(83)90320-6

Sundgren, 1981, Thin Solid Films, 80, 77, 10.1016/0040-6090(81)90209-1

Eizenberg, 1983, J. Appl. Phys., 54, 3190, 10.1063/1.332478

B.-O. Johansson and J.-E. Sundgren, unpublished work, 1983.

Jacobsson, 1978, Thin Solid Films, 54, 107, 10.1016/0040-6090(78)90281-X

Thornton, 1977, Annu. Rev. Mater. Sci., 7, 239, 10.1146/annurev.ms.07.080177.001323

Grovenor, 1984, Acta. Metall., 32, 773, 10.1016/0001-6160(84)90150-0

Marinov, 1977, Thin Solid Films, 42, 265, 10.1016/0040-6090(77)90361-3

Enomoto, 1981, Thin Solid Films, 86, L201, 10.1016/0040-6090(81)90163-2

Münz, 1982, Thin Solid Films, 96, 79, 10.1016/0040-6090(82)90215-2

Vilok, 1978, Sov. Powder Metall. Met. Ceram., 17, 467, 10.1007/BF00795804

Goldschmidt, 1967, Interstitial Alloys, 219

Francombe, 1975

Alexander, 1976, J. Vac. Sci. Technol., 13, 96, 10.1116/1.568964

Blachman, 1973, J. Vac. Sci. Technol., 10, 355, 10.1116/1.1318029

Hoffman, 1977, Thin Solid Films, 40, 355, 10.1016/0040-6090(77)90137-7

Fark, 1983, Thin Solid Films, 100, 193, 10.1016/0040-6090(83)90276-6

Coutts, 1978

Mumtaz, 1982, J. Vac. Sci. Technol., 20, 345, 10.1116/1.571461

Schintlmeister, 1975, J. Vac. Sci. Technol., 12, 743, 10.1116/1.568659

Karlsson, 1982, Phys. Scr., 25, 775, 10.1088/0031-8949/25/6A/030

Böhm, 1972, J. Less-Common Met., 27, 311, 10.1016/0022-5088(72)90063-X

Chassaing, 1980, 201, 389

Rivory, 1981, Thin Solid Films, 78, 161, 10.1016/0040-6090(81)90615-5

Schlegel, 1977, J. Phys. C, 10, 4889, 10.1088/0022-3719/10/23/022

De Maayer, 1976, Philos. Mag., 34, 1191, 10.1080/00318087608227740

Martin, 1982, Vacuum, 32, 359, 10.1016/0042-207X(82)93829-5