Peculiarities of 3D nanoisland formation on vicinal surfaces during MBE process (simulation)

D.V. Brunev1, A.N. Karpov2, T.Yu. Sisenko2, N.L. Shwartz1, Z.S. Yanovitskaja1
1Institute of Semiconductor Physics, Novosibirsk, Russia
2Novosibirsk State Technical University, Novosibirsk, Russia

Tóm tắt

Using Monte Carlo simulation atomic interlayer diffusion influence on the morphology of vicinal surfaces during MBE was investigated. Mechanism of 3D island formation on the surfaces with steps and echelons of steps was suggested. It was revealed, that for heterosystems with predominating atomic transport from island edge to the upper layers, 3D islands are formed on vicinal surfaces with very narrow terraces.

Từ khóa

#Surface morphology #Atomic layer deposition #Lattices #Capacitive sensors #Substrates #Atomic measurements #Stress #Gold #Temperature #Physics

Tài liệu tham khảo

10.1103/PhysRevB.61.7223 ncizvcstny, 2001, Nanotechnology, 12, 437, 10.1088/0957-4484/12/4/310 10.1088/0957-4484/12/4/304 10.1134/1.1187502 venables, 1984, Rep Progr Phys, 47, 399, 10.1088/0034-4885/47/4/002 evtichiev, 1998, Fiz Techn Polupr, 32, 860 neizvcstny, 2002, Microclcktronika, 31, 104 10.1103/PhysRevB.37.6559 savenko, 2001, Izv Acad Nauk Scr Fiz, 65, 171 voigtlandcr, 2001, Surf Sci Rcp, 43, 127, 10.1016/S0167-5729(01)00012-7 brunev, 2001, Izv Acad Nauk Ser Fiz, 65, 196 10.1016/S0039-6028(97)00536-0