Peculiarities of 3D nanoisland formation on vicinal surfaces during MBE process (simulation)
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 3 pp. - 2002
Tóm tắt
Using Monte Carlo simulation atomic interlayer diffusion influence on the morphology of vicinal surfaces during MBE was investigated. Mechanism of 3D island formation on the surfaces with steps and echelons of steps was suggested. It was revealed, that for heterosystems with predominating atomic transport from island edge to the upper layers, 3D islands are formed on vicinal surfaces with very narrow terraces.
Từ khóa
#Surface morphology #Atomic layer deposition #Lattices #Capacitive sensors #Substrates #Atomic measurements #Stress #Gold #Temperature #PhysicsTài liệu tham khảo
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