PECVD of amorphous TiO2 thin films: effect of growth temperature and plasma gas composition

Thin Solid Films - Tập 371 Số 1-2 - Trang 126-131 - 2000
Giovanni A. Battiston1, R. Gerbasi1, A. Gregori1, Marina Porchia1, Sandro Cattarin2, G. Rizzi3
1ICTIMA-CNR, Corso Stati Uniti 4, I-35127 Padova, Italy
2IPELP-CNR, Corso Stati Uniti 4, I-35127 Padova, Italy
3Università di Padova, Dipartimento CIMA-Via Loredan 4, I-35131 Padova, Italy

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Battiston, 1994, Thin Solid Films, 239, 186, 10.1016/0040-6090(94)90849-4

G.A. Battiston, R. Gerbasi, M. Guerra, M. Porchia, in: M. Allendorf, C. Bernard (Eds.), Proceedings of the Fourteenth International Conference on Chemical Vapour Deposition/EUROCVD 11, vol. 97-25, The Electrochemical Society, Pennington, 1997, p. 660.

Frenck, 1991, Thin Solid Films, 201, 327, 10.1016/0040-6090(91)90121-D

Lee, 1994, Thin Solid Films, 237, 105, 10.1016/0040-6090(94)90245-3

Lee, 1996, Thin Solid Films, 287, 120, 10.1016/S0040-6090(96)08784-6

Martinet, 1997, J. Non-Cryst. Solids, 216, 77, 10.1016/S0022-3093(97)00175-0

Taschner, 1991, Mater. Sci. Eng. A, 139, 67, 10.1016/0921-5093(91)90598-H

Taschner, 1993, Surf. Coat. Technol., 59, 207, 10.1016/0257-8972(93)90084-2

Wierzchon, 1993, Surf. Coat. Technol., 59, 217, 10.1016/0257-8972(93)90086-4

Weber, 1995, Appl. Phys. Lett., 67, 2934, 10.1063/1.114847

Rie, 1993, Surf. Coat. Technol., 59, 202, 10.1016/0257-8972(93)90083-Z

Swanepoel, 1983, J. Phys. E: Sci. Instrum., 16, 1214, 10.1088/0022-3735/16/12/023

Bertoncello, 1992, Surf. Interface Anal., 18, 525, 10.1002/sia.740180712

Cattarin, 1994, J. Electrochem. Soc., 141, 1095, 10.1149/1.2054878

Otterman, 1996, Thin Solid Films, 286, 32, 10.1016/S0040-6090(96)08848-7

Le Mercier, 1997, J. Phys. Chem. Solids, 58, 679, 10.1016/S0022-3697(96)00196-5

Hauf, 1999, J. Mater. Sci., 34, 1287, 10.1023/A:1004589813050

Boschloo, 1996, J. Phys. Chem., 100, 19489, 10.1021/jp961553s

Boschloo, 1997, J. Electrochem. Soc., 144, 1311, 10.1149/1.1837590

Butler, 1977, J. Appl. Phys., 48, 1914, 10.1063/1.323948

Cattarin, 1997, J. Electroanal. Chem., 437, 85, 10.1016/S0022-0728(97)00067-3