Micromechanical calibrating leak made by methods of microtechnologies
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 2 pp. - 2002
Tóm tắt
The helium leak construction and technological route of its fabrication are presented. The set of devices was made and their characteristics were investigated. There are supposed to use fabricated devices as the standard at calibration helium detectors.
Từ khóa
#Micromechanical devices #Helium #Manufacturing #Biomembranes #Calibration #Leak detection #Detectors #Anisotropic magnetoresistance #Research and development #LaboratoriesTài liệu tham khảo
pakkonen, 0, Kalibrovochnyj natekatel’ geliya izgotovIennyj metodami mikrotehnologij, Diplomnaya rabota na temu
rozanov, 1990, Vakuumnaya tehnika, 2-e izd pererab i dop – M Vyssh Shk, 320c