Micromechanical calibrating leak made by methods of microtechnologies

A.V. Pakkonen1
1Research and Development Laboratory AMT&MEMS, Saint Petersburg State Technical University, Saint Petersburg, Russia

Tóm tắt

The helium leak construction and technological route of its fabrication are presented. The set of devices was made and their characteristics were investigated. There are supposed to use fabricated devices as the standard at calibration helium detectors.

Từ khóa

#Micromechanical devices #Helium #Manufacturing #Biomembranes #Calibration #Leak detection #Detectors #Anisotropic magnetoresistance #Research and development #Laboratories

Tài liệu tham khảo

pakkonen, 0, Kalibrovochnyj natekatel’ geliya izgotovIennyj metodami mikrotehnologij, Diplomnaya rabota na temu rozanov, 1990, Vakuumnaya tehnika, 2-e izd pererab i dop – M Vyssh Shk, 320c