Microfabrication of microlens array by focused ion beam technology

Acklin, 1994, Packaging considerations for planar optical interconnection system, Appl. Opt., 33, 1391, 10.1364/AO.33.001391

Popovic, 1988, Technique for monolithic fabrication of microlens arrays, Appl. Opt., 27, 1281, 10.1364/AO.27.001281

Jay, 1993, Preshaping photoresist for refractive microlens fabrication, Proc. SPIE, 1992, 275, 10.1117/12.165698

Jay, 1992, Refractive microlens arrayfabrication parameters and their effect on optical performance, Proc. SPIE, 1751, 236

Gale, 1983, The fabrication of fine lens arrays by laser beam writing, Proc. SPIE, 398, 347, 10.1117/12.935397

Rossi, 1995, Refractive and diffractive properties of planar micro-optical elements, Appl. Optics, 34(26), 5996, 10.1364/AO.34.005996