Measurement of displacement using phase shifted wedge plate lateral shearing interferometry

Bosch, 2001, Laser ranging: a critical review of usual techniques for distance measurement, Opt. Eng., 40, 10, 10.1117/1.1330700 Makynen, 1998, A binary photodetector array for position sensing, Sens. Actuators Part A: Phys., 65, 45, 10.1016/S0924-4247(97)01662-2 Bosch, 1992, The physical principles of wavelength-shift interferometric laser rangefinders, J. Opt., 23, 117, 10.1088/0150-536X/23/3/005 Kim, 2000, A robust signal processing algorithm for linear displacement measuring optical transmission sensors, Rev. Sci. Instrum., 71, 3220, 10.1063/1.1304870 Higurashi, 1999, Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection, Appl. Opt., 38, 1746, 10.1364/AO.38.001746 Lin, 2001, Three-dimensional displacement measurement using a newly designed moiré interferometer, Opt. Eng., 40, 822, 10.1117/1.1355958 Rössler, 2006, Moiré methods for measurement of displacement and topography, Czech J. Phys., 56, 101, 10.1007/s10582-006-0073-y Wang, 2001, Displacement measurement based on Fourier transform method with external laser cavity modulation, Rev. Sci. Instrum., 72, 3440, 10.1063/1.1386898 Bosch, 2001, Optical feedback interferometry for sensing application, Opt. Eng., 40, 20, 10.1117/1.1330701 Shankar, 2005, A new approach using a phase-measuring algorithm in detector-width-compensated displacement -measuring interferometer, Meas. Sci. Technol., 16, 1778, 10.1088/0957-0233/16/9/009 Shankar, 2004, A grating scale for noise free natural interference fringe suitable for compact displacement measuring grating interferometer, J. Opt., 33, 119, 10.1007/BF03354758 Bae, 2001, Multi-degree-of-freedom displacement measurement system for milli-structures, Meas. Sci. Technol., 12, 1495, 10.1088/0957-0233/12/9/316 Oh, 2001, An averaging method for optical triangulation displacement sensors using diffraction grating, Rev. Sci. Instrum., 72, 2822, 10.1063/1.1373669 Rastogi, 1993, Techniques of displacement and deformation measurement, 41 Sun, 2007, The separation of out-of-plane displacement from in plane components by fringe carrier method based on large image-shearing ESPI, Opt. Commun., 275, 305, 10.1016/j.optcom.2007.03.008 Morales, 2009, Uncertainty analysis of whole field phase differences retrieved from ESPI fringe patterns by using the Fourier transform method (FTM), Opt. Commun., 282, 686, 10.1016/j.optcom.2008.10.072 Bhaduri, 2011, Two wavelength simultaneous DSPI and DSP for 3D displacement field measurements, Opt. Commun., 284, 2437, 10.1016/j.optcom.2011.01.036 Berkovic, 2012, Optical methods for distance and displacement measurements, Adv. Opt. Photonics, 4, 441, 10.1364/AOP.4.000441 Ghim, 2014, 3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry, Opt. Express, 22, 5098, 10.1364/OE.22.005098 Lv, 2011, Implementation of tridirectional large lateral shearing displacement interferometry in temperature measurement of a diffused ethylene flame, Appl. Opt., 50, 3924, 10.1364/AO.50.003924 Ghai, 2008, Detection of phase singularity using a lateral shear interferometer, Opt. Lasers Eng., 46, 413 Darlin, 1995, Modified double-wedge-plate shearing interferometer for collimation testing, Appl. Opt., 34, 2886, 10.1364/AO.34.002886 Mantravadi, 1992, Lateral shearing interferometry, 123 Spagnolo, 2000, Talbot effect application: measurement of distance with a Fourier transform method, Meas. Sci. Technol., 11, 77, 10.1088/0957-0233/11/1/312 Spagnolo, 2002, Displacement measurement using the Talbot effect with a Ronchi grating, J. Opt. A: Pure Appl. Opt., 4, 376, 10.1088/1464-4258/4/6/383 Mehta, 2005, Distance measurement with extended range using lateral shearing interferometry and Fourier transform fringe analysis, Opt. Eng., 46 Griffin, 2001, Phase-shifting shearing interferometer, Opt. Lett., 26, 140, 10.1364/OL.26.000140 Song, 2004, Simple phase-shifting method in a wedge-plate lateral-shearing interferometer, Appl. Opt., 43, 3989, 10.1364/AO.43.003989 Mehta, 2013, Liquid-crystal phase-shifting lateral shearing interferometer with improved fringe contrast for 3D surface profilometry, Appl. Opt., 52, 6116, 10.1364/AO.52.006119 Disawal, 2014, Phase shifting lateral shearing interferometry using wedge plate and interferometric grating, Appl. Opt., 53, 7534, 10.1364/AO.53.007534 Trivedi, 2013, Measurement of focal length using phase shifted moiré deflectometry, Opt. Lasers Eng., 51, 776, 10.1016/j.optlaseng.2013.01.018 Singh, 2005, Measurement of focal length with phase shifting Talbot interferometry, Appl. Opt., 44, 1572, 10.1364/AO.44.001572 Trivedi, 2012, Measurement of slope of bent plates using phase shifted moiré deflectometry, J. Mod. Opt., 59, 1016, 10.1080/09500340.2012.697199 Pfeifer, 1995, Phase shifting moiré deflectometry, Optik (Stuttg.), 98, 158 Choi, 1995, Wedge-plate lateral shearing interferometry for collimation testing: use of moiré technique, Appl. Opt., 34, 3628, 10.1364/AO.34.003628 Liu, 2000, Effect of unparallel grating planes in Talbot interferometry, Appl. Opt., 39, 2084, 10.1364/AO.39.002084 Liu, 2001, Effects of a small inclination misalignment in Talbot interferometry by use of gratings with arbitrary line orientation. II. Experimental verification, Appl. Opt., 40, 3668, 10.1364/AO.40.003668 International Organization for Standardization, Guide to the expression of uncertainty in measurement, Geneva Switzerland; 1995. Available at: 〈http://www.bipm.org/en/publications/guides/〉 Disawal, 2014, Improved measurement characteristics in collimation testing using Lau interferometry and Fourier fringe analysis technique, Precis. Eng., 38, 948, 10.1016/j.precisioneng.2014.06.005 Disawal, 2014, Phase shifting lateral shearing interferometry using wedge plate and interferometric grating, Appl. Opt., 53, 7534, 10.1364/AO.53.007534 Singh, 2011, Application of wavelet filtering techniques to Lau interferometric fringe analysis for measurement of small tilt angles, Optik, 122, 1666, 10.1016/j.ijleo.2010.10.022 Chen, 2008, Retrieval of instantaneous frequency from digital holograms based on adaptive windows, Opt. Eng., 47, 065801, 10.1117/1.2939418 Quan, 2010, Phase retrieval techniques in fringe projection profilometry, Opt. Lasers Eng., 48, 235, 10.1016/j.optlaseng.2009.06.013