Magnetic properties of dc magnetron sputtered and evaporated amorphous films
Tóm tắt
Compositions of Fe81B13.5Si3.5C2, Fe67Co18Si1B14 and Fe5.85Co72.15Mo2B15Si5 were deposited on to rigid and flexible substrates for the first time using a dc sputtering source as part of a novel Rotating Cryostat (RC). The films sputtered on silicon and glass show only isotropic magnetisation, whereas those sputtered on a polyimide (KaptonTM) substrate exhibited either isotropic or anisotropic magnetisation depending upon composition. Similar findings were obtained for equivalent evaporated films.