Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application

Microelectronic Engineering - Tập 95 - Trang 90-101 - 2012
Qiuling Chen1, Qiuping Chen1, Gabriele Maccioni2,3, Adriano Sacco1,3, Sergio Ferrero1, Luciano Scaltrito1
1Politecnico di Torino, Material Science and Chemical Engineering Department, C.so Duca degli Abruzzi 24, 10129 Torino, Italy
2Politecnico di Torino, Physics Department, C.so Duca degli Abruzzi 24, 10129 Torino, Italy
3Italian Institute of Technology (IIT), Center for Space Human Robotics, C.so Trento 21, 10129 Torino, Italy

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