1LETI, Commissariat à l’Energie Atomique, GRENOBLE Cedex, France
Tóm tắt
ABSTRACTWe present an overview of the thermal modeling of CW laser induced crystallization of SOI. The dynamical case for a three-layer structure is derived. Effects of the phase change (increase in reflectivity, latent heat) are also treated. Analytical expressions are given and the models are compared to experiment.
Từ khóa
Tài liệu tham khảo
Touloukian, 1973, Thermophysical Properties of Matter, Volume 10, Thermal Diffusivity
