Analogic fiber optic position sensor with nanometric resolution
SENSORS, 2002 IEEE - Tập 2 - Trang 926-930 vol.2
Tóm tắt
This paper describes a miniature analogic position sensor. This sensor is dedicated to high resolution displacement measurement (10 nm) between two positions over a long range (a few millimeters). The working principle of the sensor is presented as well as experimental results.
Từ khóa
#Optical fibers #Optical fiber sensors #Sensor phenomena and characterization #Optical sensors #Mirrors #Size measurement #Optical interferometry #Displacement measurement #Capacitive sensors #Position measurementTài liệu tham khảo
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