Growth of ZrC thin films by aerosol-assisted MOCVD

Journal of Crystal Growth - Tập 304 - Trang 324-332 - 2007
Yong Sun Won1, Young Seok Kim1, Venu G. Varanasi1, Olga Kryliouk1, Timothy J. Anderson1, Chatu T. Sirimanne2, Lisa McElwee-White2
1Department of Chemical Engineering, University of Florida, Gainesville, FL 32611-6005, USA
2Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA

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