Pleiades Publishing Ltd

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Wireless magnetoresistive microsystem for magnetic field measurements
Pleiades Publishing Ltd - Tập 42 - Trang 363-367 - 2013
V. V. Amelichev, A. N. Saurov, V. V. Aravin, A. A. Reznev, A. A. Demin, M. V. Khokhlov
The design and technology of magnetic semiconductor elements of wireless magnetoresistive microsystems for magnetic field measurements are proposed and the results of the investigations of a highly sensitivity magnetoresistive converter with magnetic field concentrators are presented. The characteristics of the developed measuring amplifier for operation with a signal from a low-resistance magneto...... hiện toàn bộ
Features of the Kinetics of Bulk and Heterogeneous Processes in CHF3 + Ar and C4F8 + Ar Plasma Mixtures
Pleiades Publishing Ltd - Tập 48 Số 2 - Trang 99-106 - 2019
Murin, D. B., Efremov, A. M., Kwon, K.-H.
We carry out a comparative study of the kinetics of plasma-chemical processes and plasma composition in CHF3 + Ar and C4F8 + Ar mixtures under the conditions of a high-frequency (13.56 MHz) induction discharge. Using diagnostic methods and plasma modeling, the general features and differences of the plasma’s electrophysical parameters in the studied systems are established together with the key bu...... hiện toàn bộ
Parametrization of a Microwave and the Noise Model of a Metamorphic 0.15 µm MHET InAlAs/InGaAs Transistor
Pleiades Publishing Ltd - Tập 50 - Trang 170-177 - 2021
A. A. Gorelov, V. V. Lokotko, N. I. Kargin, I. S. Vasilievsky, K. S. Grishakov, R. V. Ryzhuk
AlGaAs MHEMT transistors are studied in the microwave frequency range with a gate length of 0.15 μm. It is found that the discrepancy between the experimental and theoretically calculated, within the model, S-parameters does not exceed 0.5% in the frequency range from 1 to 30 GHz. The static characteristics of the device are satisfactorily described by the indicated model in the voltage range of t...... hiện toàn bộ
Plasma etching of poly-Si/SiO2/Si structures: Langmuir-probe and optical-emission-spectroscopy monitoring
Pleiades Publishing Ltd - Tập 36 - Trang 179-192 - 2007
K. V. Rudenko, A. V. Myakon’kikh, A. A. Orlikovsky
An in-depth experimental evaluation is presented of the Langmuir probe as a tool for monitoring the etching of polysilicon-gate MOS structures with an inductively coupled high-density plasma excited in a mixture of SF6, O2, and Ar. It is shown that Langmuir-probe measurements made in parallel with optical actinometry offer ways of accurate end-point detection and etch-rate monitoring. It is establ...... hiện toàn bộ
Capacitance Sensors Based on Nanotube Supercondensers
Pleiades Publishing Ltd - Tập 46 - Trang 506-509 - 2018
R. A. Brazhe, A. F. Savin
A design of a capacitance sensor, which remains highly sensitive while allowing the significant miniaturization of its sensitive element, the condenser, is proposed. For this purpose, supercondensers based on electroconducting and insulating nanotubes are used. The presented calculations show the possibility, in principle, to create pressure and displacement capacitance sensors on this basis with ...... hiện toàn bộ
Radiation-enhanced thermal oxidation of silicon
Pleiades Publishing Ltd - Tập 36 Số 1 - Trang 53-55 - 2007
Simakov, A. B., Bashin, A. Yu.
A technique of radiation-enhanced thermal oxidation of silicon is developed and implemented in process equipment. Test SiO2 films are grown under exposure to 511-keV gamma-ray photons. Their electrical and radiation performance are evaluated. Basic mechanisms of radiation-enhanced oxide growth are proposed.
Charge transport in thin layers of ferroelectric Hf0.5Zr0.5O2
Pleiades Publishing Ltd - Tập 45 - Trang 350-356 - 2016
O. M. Orlov, D. R. Islamov, A. G. Chernikova, M. G. Kozodaev, A. M. Markeev, T. V. Perevalov, V. A. Gritsenko, G. Ya. Krasnikov
The mechanism responsible for the charge transport in thin ferroelectric Hf0.5Zr0.5O2 films has been studied. It is shown that in these films the transport mechanism is phonon-assisted tunneling between the traps. The optimal thickness of dielectric film for TiN/Hf0.5Zr0.5O2/Pt structures is determined. As a result of comparing the experimental current–voltage (I–V) characteristics of TiN/Hf0.5Zr0...... hiện toàn bộ
Microelectromechanical System for Controlling Flow Past an Airfoil: Pressure Transducers
Pleiades Publishing Ltd - Tập 31 - Trang 359-365 - 2002
A. A. Taskin, B. I. Fomin, E. I. Cherepov, V. A. Gridchin, V. M. Lubimsky, S. P. Khabarov, G. R. Grek, A. V. Dovgal', V. V. Kozlov
A technology is developed for making single-chip diaphragm pressure sensors with polycrystalline-silicon piezoresistive elements on a monocrystalline-silicon substrate. It allows one to produce piezoresistive elements with a conductivity–temperature characteristic that neutralizes the temperature dependence of piezoresistive sensitivity. Sensors with a 1.8 × 1.8-mm2 diaphragm are designed and fabr...... hiện toàn bộ
Formation of Local Insulating Regions by Stain Mask Etching
Pleiades Publishing Ltd - Tập 30 - Trang 88-93 - 2001
V. V. Starkov, E. A. Starostina, V. T. Volkov, A. F. Vyatkin
Local porous regions were formed in silicon by stain etching through various masks. The effect of mechanical strain on the etching process was established for the first time. Results obtained can help to create local porous regions in silicon ICs.
Mechanical Control of the Spectrum of a Chain of Resonators and the Organization of Remote Interaction Between Quantum Dots
Pleiades Publishing Ltd - Tập 50 - Trang 365-378 - 2021
A. V. Tsukanov, I. Yu. Kateev
Problems of controlling the spectral and dynamic properties of a structure formed by a one-dimensional array (chain) of interacting microcavities (MCs) are considered. Instead of using traditional approaches based on changing their refractive index, the method used here is based on reversible variation in the length of one of the Bragg resonators. The calculations show that this algorithm makes it...... hiện toàn bộ
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