Microsystem Technologies
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Sub-6 GHz band massive MIMO antenna system for variable deployment scenarios in 5G base stations
Microsystem Technologies - - 2022
Improving injection efficiency of gate modulation ROIC interface for HgCdTe IR photodiodes
Microsystem Technologies - - 2017
A Severe Loss In Memoriam Dr.-Ing. Andreas Schubert
Microsystem Technologies - Tập 9 - Trang 283-283 - 2003
Effect of vacuum packaging on bandwidth of push–pull type capacitive accelerometer structure
Microsystem Technologies - Tập 24 - Trang 4855-4862 - 2018
This paper presents the effect of vacuum packaging on the band-width of push–pull type capacitive accelerometer structure. The accelerometer structure (for ± 30 g application) consists of silicon proof mass (1000 μm × 1000 μm × 30 μm) suspended by four L-shaped beams over 1 μm deep cavity. The fixed electrodes (Au) are on Pyrex glass substrates which are anodically bonded to the Si substrate. The ......
Two-dimensional topology analysis on the complex flow driven by corotating disks mounted in a non-axisymmetric enclosure
Microsystem Technologies - - Trang 1-8 - 2023
We have investigated fluid flow in a hard disk drive (HDD) with particle image velocimetry (PIV). Corotating disks mounted in an enclosure creates a three-dimensional unstable flow. The unstable flow results in errors in positioning the magnetic head that reads and writes data. We observed the flow through visualization and conducted measurements of flow velocities based on PIV performed in a simp......
The study of LIGA technique at NSRL
Microsystem Technologies - Tập 2 - Trang 171-173 - 1996
The activity of LIGA technique was started in the fall of 1993 at National Synchrotron Radiation Laboratory (NSRL), some primary results have been obtained. Micro gearwheels were produced by deep-etch lithography using Hefei light source. The largest diameter of gearwheel is 200 μm, the smallest one only 35 μm, both with thickness of 50 μm. The first metallic structure of nickel was fabricated re......
Testing of MEMS capacitive accelerometer structure through electro-static actuation
Microsystem Technologies - - 2013
Comprehensive study of RF analysis of G/GO-based NEMS shunt switch
Microsystem Technologies - Tập 28 - Trang 1069-1075 - 2022
High isolation and low insertion loss are the key design parameters for the NEMS switch at high frequency. The comprehensive study of radio frequency (RF) performance analysis of graphene-graphene oxide (GO) based NEMS shunt switch is done in this work. The results show that GO along with graphene can be used as a suspended beam in RF NEMS switches. The RF performance analysis of GO-based NEMS swi......
Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection
Microsystem Technologies - Tập 17 - Trang 721-730 - 2011
We present the results of a novel micro-beam deflection test used to investigate the static and dynamic mechanical behavior of submicron-thick metal films. The method demonstrated in this study allows researchers to observe the motion of micro and nano-scale thin films responding to electrostatic loads, by means of laser reflection measurements at frequency rates of up to 500 Hz. Researchers fabri......
Parametric vibrations of imperfect Timoshenko microbeams
Microsystem Technologies - Tập 23 - Trang 4917-4929 - 2017
This paper examines the size-dependent nonlinear parametric vibrations of imperfect Timoshenko microbeams subject to a time-dependent axial load. Taking into account rotary inertia and shear deformation, the modified couple stress theory is employed so as to derive a continuous expression for the elastic potential energy of the system; the geometric imperfection is modelled via a small initial def......
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