Microsystem Technologies
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Development of electrochemical micro machining for air-lubricated hydrodynamic bearings
Microsystem Technologies - Tập 9 Số 1-2 - Trang 61-66 - 2002
Modeling and finite element analysis of mechanical behavior of flexible MEMS components
Microsystem Technologies - Tập 17 - Trang 553-562 - 2011
This paper describes the studies of the mechanical characteristics of flexible MEMS components including theoretical approaches, finite element analysis and experimental investigations. Modeling and finite element analyses together with theoretical and experimental investigations are performed to estimate the elastic behavior of MEMS components as microcantilevers, microbridges and micromembranes.......
Computational analysis of air jet wheel deflector for aerodynamic drag reduction of road vehicle
Microsystem Technologies - Tập 24 - Trang 4453-4463 - 2018
A concept of an air jet wheel deflector is employed to reduce vehicle aerodynamic drag. The drag reduction mechanism of the air jet wheel deflector is as follow: When the vehicle’s driving speed is over than predetermined value, the air jet system injects air in the perpendicular direction to the free stream flow. This air jet acts as an air curtain, which reduces the aerodynamic drag by deflectin......
Motion control of a magnetically levitated microrobot using magnetic flux measurement
Microsystem Technologies - Tập 18 - Trang 1417-1424 - 2012
Recent advancements in micro/nano domain technologies have led to a renewed interest in ultra-high resolution magnetic-based actuation mechanisms. This paper deals with the development of a novel research-made magnetic microrobotic station (MMS) with promising potential in biological/biomedical applications. The MMS consists of two separate basic components: a magnetic drive unit and a microrobot.......
Modelling of the flow-rate dependent partial thermal resistance of integrated microscale cooling structures
Microsystem Technologies - Tập 23 - Trang 4001-4010 - 2016
As microscale cooling structures are integral parts of modern chip level cooling concepts, the understanding the behaviour of different assemblies is desirable. This way novel co-design concepts can be created where the conventional IC design steps are extended with thermal design capabilities resulting in a SiP/SoP design flow. The first step in this process is to create a general formula which d......
Multi-pole fine magnetic scale for high-resolution magnetic encoders evidenced by a simplified method
Microsystem Technologies - Tập 20 - Trang 1491-1496 - 2014
Magnetic encoders are widely used in linear and rotary positioning applications, specifically under harsh environments. The finer the magnetic pole-pitches of the magnetic scale in magnetic encoders the higher the resolution of the encoder. Conventional non-structured magnetic scales can be achieved with ease by dedicate magnetizing fixture at a pole pitch larger than 1 mm. It becomes extremely di......
Characterization of layer-by-layer nano self-assembled carbon nanotube/polymer film sensor for ethanol gas sensing properties
Microsystem Technologies - Tập 20 - Trang 379-385 - 2013
This paper reported a multi-wall carbon nanotubes (MWNTs)/polymer film-based sensor for ethanol gas detection. The film sensor was fabricated using layer-by-layer self-assembly method on the substrate with interdigital electrodes structure. The surface morphology of the self-assembled membranes shows a high strength, dense and random network structures, and the electrical properties of MWNTs/polym......
Analytical design of MEMS variable capacitors based on shaped-finger comb-drives
Microsystem Technologies - Tập 28 - Trang 1423-1434 - 2019
A variable capacitor is one of the widely used components in radio frequency (RF) circuits. Variable capacitors can benefit from the microelectromechanical systems (MEMS) technology, to be equipped with attractive characteristics such as high quality factor and wide tuning range. One of the design goals for MEMS varactors has been to realize linear capacitance–voltage (C–V) characteristics, for wh......
Finite element modal analysis of an HDD considering the flexibility of spinning disk–spindle, head–suspension–actuator and supporting structure
Microsystem Technologies - - 2007
Methods for highly accurate gripping of flexible micro parts
Microsystem Technologies - Tập 12 Số 7 - Trang 598-603 - 2006
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