Resist film uniformity in the microlithography processIEEE Transactions on Semiconductor Manufacturing - Tập 15 Số 3 - Trang 323-330 - 2002
Weng Khuen Ho, Lay Lay Lee, A. Tay, C. Schaper
#Resists #Sliding mode control #Thickness control #Sensor arrays #Temperature sensors #Size control #Transistors #Interference #Temperature distribution #Temperature control