IEEE Transactions on Semiconductor Manufacturing

Công bố khoa học tiêu biểu

* Dữ liệu chỉ mang tính chất tham khảo

Sắp xếp:  
Neural network modeling of reactive ion etching using optical emission spectroscopy data
IEEE Transactions on Semiconductor Manufacturing - Tập 16 Số 4 - Trang 598-608 - 2003
Sang Jeen Hong, G.S. May, Dong-Cheol Park
Resist film uniformity in the microlithography process
IEEE Transactions on Semiconductor Manufacturing - Tập 15 Số 3 - Trang 323-330 - 2002
Weng Khuen Ho, Lay Lay Lee, A. Tay, C. Schaper
#Resists #Sliding mode control #Thickness control #Sensor arrays #Temperature sensors #Size control #Transistors #Interference #Temperature distribution #Temperature control
Static charge removal with IPA solution
IEEE Transactions on Semiconductor Manufacturing - Tập 7 Số 4 - Trang 440-446 - 1994
Tadahiro Ohmi, Shiroshi Sudoh, Hideo Mishima
Minimum inventory variability schedule with applications in semiconductor fabrication
IEEE Transactions on Semiconductor Manufacturing - Tập 9 Số 1 - Trang 145-149 - 1996
Li Shu, Tian Tang, Donald W. Collins
An improved methodology for real-time production decisions at batch-process work stations
IEEE Transactions on Semiconductor Manufacturing - Tập 6 Số 3 - Trang 219-225 - 1993
Wentao Weng, Robert C. Leachman
Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants
IEEE Transactions on Semiconductor Manufacturing - Tập 7 Số 3 - Trang 374-388 - 1994
S.C.H. Lu, D. Ramaswamy, P. Kumar
Linear control rules for production control of semiconductor fabs
IEEE Transactions on Semiconductor Manufacturing - Tập 9 Số 4 - Trang 536-549 - 1996
C. Roger Glassey, J. George Shanthikumar, Sridhar Seshadri
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach
IEEE Transactions on Semiconductor Manufacturing - Tập 11 Số 3 - Trang 333-357 - 1998
MengChu Zhou
Dynamic bottleneck control in wide variety production factory
IEEE Transactions on Semiconductor Manufacturing - Tập 12 Số 3 - Trang 273-280 - 1999
Tatsuya Nakata, Kanae Matsui, Y. Miyake, K. Nishioka
Scheduling of mask shop E-beam writers
IEEE Transactions on Semiconductor Manufacturing - Tập 11 Số 1 - Trang 165-172 - 1998
Yi-Feng Hung
Tổng số: 22   
  • 1
  • 2
  • 3