IEEE Transactions on Semiconductor Manufacturing

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Neural network modeling of reactive ion etching using optical emission spectroscopy data
IEEE Transactions on Semiconductor Manufacturing - Tập 16 Số 4 - Trang 598-608 - 2003
Sang Jeen Hong, G.S. May, Dong-Cheol Park
Resist film uniformity in the microlithography process
IEEE Transactions on Semiconductor Manufacturing - Tập 15 Số 3 - Trang 323-330 - 2002
Weng Khuen Ho, Lay Lay Lee, A. Tay, C. Schaper
With the trends toward smaller feature size, one of the challenge is to control the resist thickness and uniformity to a tight tolerance in order to minimize thin film interference effects on the critical dimensions. In this paper, we propose a new approach to improve resist thickness control and uniformity through the soft-bake process. Using an array of thickness sensors, a multizones bakeplate ... hiện toàn bộ
#Resists #Sliding mode control #Thickness control #Sensor arrays #Temperature sensors #Size control #Transistors #Interference #Temperature distribution #Temperature control
Static charge removal with IPA solution
IEEE Transactions on Semiconductor Manufacturing - Tập 7 Số 4 - Trang 440-446 - 1994
Tadahiro Ohmi, Shiroshi Sudoh, Hideo Mishima
Minimum inventory variability schedule with applications in semiconductor fabrication
IEEE Transactions on Semiconductor Manufacturing - Tập 9 Số 1 - Trang 145-149 - 1996
Li Shu, Tian Tang, Donald W. Collins
An improved methodology for real-time production decisions at batch-process work stations
IEEE Transactions on Semiconductor Manufacturing - Tập 6 Số 3 - Trang 219-225 - 1993
Wentao Weng, Robert C. Leachman
Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants
IEEE Transactions on Semiconductor Manufacturing - Tập 7 Số 3 - Trang 374-388 - 1994
S.C.H. Lu, D. Ramaswamy, P. Kumar
Linear control rules for production control of semiconductor fabs
IEEE Transactions on Semiconductor Manufacturing - Tập 9 Số 4 - Trang 536-549 - 1996
C. Roger Glassey, J. George Shanthikumar, Sridhar Seshadri
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach
IEEE Transactions on Semiconductor Manufacturing - Tập 11 Số 3 - Trang 333-357 - 1998
MengChu Zhou
Dynamic bottleneck control in wide variety production factory
IEEE Transactions on Semiconductor Manufacturing - Tập 12 Số 3 - Trang 273-280 - 1999
Tatsuya Nakata, Kanae Matsui, Y. Miyake, K. Nishioka
Scheduling of mask shop E-beam writers
IEEE Transactions on Semiconductor Manufacturing - Tập 11 Số 1 - Trang 165-172 - 1998
Yi-Feng Hung
Tổng số: 22   
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