Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach

IEEE Transactions on Semiconductor Manufacturing - Tập 11 Số 3 - Trang 333-357 - 1998
MengChu Zhou1
1Dept. of Electr. & Comput. Eng., New Jersey Inst. of Tech., Newark, NJ, USA

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Tài liệu tham khảo

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