What is the Young's Modulus of Silicon?

hopcroft, 2007, Silicon micromechanical resonators for frequency references

10.1109/FREQ.1997.639192

10.1109/SENSOR.1995.721749

maluf, 2000, An Introduction to Microelectromechanical Systems Engineering

10.1109/84.623107

10.1107/S0021889892005387

10.1143/JJAP.39.368

10.1063/1.323747

10.1088/0022-3727/19/3/014

10.1063/1.1659498

10.1088/0022-3727/4/2/312

burenkov, 1974, temperature dependence of the elastic constants of silicon, Fizika Tverdogo Tela (Soviet Physics Solid State), 16, 1496

10.1147/rd.54.0266

10.1103/PhysRev.161.756

10.1063/1.1702809

10.1063/1.359201

bescond, 2002, measurement by laser generated ultrasound of the stiffness tensor of an anisotropic material, Acustica United Acta Acustica, 88, 50

mason, 1958, Physical Acoustics and the Properties of Solids

10.1063/1.1661935

sharpe, 2002, The MEMS Handbook

10.1109/84.896765

10.1063/1.1313776

10.1109/PROC.1982.12331

hopcroft, 2002, MAT-Test A new method for thin-film materials characterization

senturia, 2001, Microsystem Design, 10.1007/b117574

nye, 1985, Physical Properties of Crystals Their representation by Tensors and Matrices

10.1109/LED.2004.824840

kelly, 1973, Strong Solids

2002, Specifications for Polished Monocrystalline Silicon Wafers

auld, 1990, Acoustic Fields and Waves in Solids

madou, 2001, Fundamentals of Microfabrication

10.1063/1.1713863

liu, 2006, Foundations of MEMS

li, 2002, study on ultra-thin nems cantilevers - high yield fabrication and size-effect on young's modulus of silicon, Proc 15th IEEE Int Conf MEMS, 427

george, 1997, EMIS Datareviews, 20, 98

10.1103/PhysRev.134.A1387

10.1063/1.3148774

10.1063/1.2753758

10.1063/1.329108

10.1109/JMEMS.2008.924253

shanker, 1978, acoustical investigation in pure and doped n-type germanium and silicon, J Acoust Soc India, 6, 62

2007, Comsol Multiphysics

timoshenko, 1959, Theory of Plates and Shells

gorman, 1975, Free Vibration Analysis of Beams and Shafts

young, 1989, Roark's Formulas for Stress and Strain