VHF free-free beam high-Q micromechanical resonators

10.1109/SENSOR.1991.148932

10.1109/84.260257

thomson, 1981, Theory of Vibration with Applications

weaver jr, 1990, Vibration Problems in Engineering

flugge, 1962, Handbook of Engineering Mechanics

johnson, 1983, Mechanical Filters in Electronics

timoshenko, 1958, Strength of Materials Part I Elementary Theory and Problems

10.1109/T-ED.1967.15912

10.1016/0250-6874(89)87098-2

10.1109/SOLSEN.1988.26442

stowe, 1999, dissipation microscopy based on electronic drag, 10th Int Solid-State Sens Actuators Conf Tech Dig, 1208

wong, 1998, micromechanical mixer<formula><tex> $+$</tex></formula>filters, IEEE Tech Dig Int Electron Device Meeting, 471

10.1109/58.808881

10.1063/1.117548

10.1109/4.839911

zook, 1998, polysilicon sealed vacuum cavities for mems, 45th Int Vacuum Thin Films Processing Symp Abstracts, 23

10.1109/22.780400

tilmans, 1994, electrostatically driven vacuum-encapsulated polysilicon resonators: part ii. theory and performance, Sens Actuators A Phys, a45, 67, 10.1016/0924-4247(94)00813-2

10.1109/T-ED.1986.22519

wong, 1999, anneal-activated, tunable, 68 mhz micromechanical filters, 10th Int Solid-State Sens Actuators Conf Tech Dig, 1390

10.1109/MEMSYS.1989.77962

10.1117/12.323893

10.1126/science.161.3848.1320

10.1109/84.809070

10.1109/4.753677

rabinovich, 1999, prediction of mode frequency shifts due to electrostatic bias, 10th Int Solid-State Sens Actuators Conf Tech Dig, 442

10.1109/T-SU.1982.31335

10.1109/FREQ.1994.398345

10.1109/ULTSYM.1998.762298