Uncooled microbolometer detector: recent developments at ULIS

Opto-Electronics Review - Tập 14 Số 1 - 2006
Jean-Luc Tissot1, C. Trouilleau1, B. Fièque1, A. Crastes1, O. Legras1
1ULIS, BP 27, 38113, Veurey-Voroize, France

Tóm tắt

AbstractUncooled infrared focal plane arrays are being developed for a wide range of thermal imaging applications. Fire-fighting, predictive maintenance, process control and thermography are a few of the industrial applications which could take benefit from uncooled infrared detector. Therefore, to answer these markets, a 35-μm pixel-pitch uncooled IR detector technology has been developed enabling high performance 160×120 and 384×288 arrays production. Besides a wide-band version from uncooled 320×240/45 μm array has been also developed in order to address process control and more precisely industrial furnaces control. The ULIS amorphous silicon technology is well adapted to manufacture low cost detector in mass production. After some brief microbolometer technological background, we present the characterization of 35 μm pixel-pitch detector as well as the wide-band 320×240 infrared focal plane arrays with a pixel pitch of 45 μm.

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Tài liệu tham khảo

C. Vedel, J.L. Martin, J.L. Ouvrier-Buffet, J.L. Tissot, M. Vilain, and J.J. Yon, “Amorphous silicon based uncooled microbolometer IRFPA”, Proc. SPIE 2698, 276–283 (1999).

C. Trouilleau, A. Crastes, J.L. Tissot, J.P. Chatard, and S. Tinnes, “Amorphous silicon based uncooled microbolometer IRFPA”, Proc. SPIE 5251, 272–279 (2003).

J.L. Tissot, M. Vilain, A. Crastes, S. Tinnes, A. Larre, O. Legras, and J.J. Yon “Uncooled IRFPA with high performance and low thermal time constant”, Proc. SPIE 5612, 72–77 (2004).

J.J. Yon, A. Astier, S. Bisotto, G. Chamings, A. Durand, J.L. Martin, E. Mottin, J.L. Ouvrier-Buffet, and J.L. Tissot, “First demonstration of 25-μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR”, SPIE Proc. 5783, 432–440 (2005).

B.D. Oelrich, A. Crastes, C.I. Underwood, and S. Mackin, “A low-cost mid-wave IR microsatellite image concept based on uncooled technology”, Proc. SPIE 5570, 209–217 (2004).

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Opto-Electronics Review

Tập 14 Số 1

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