Ultrasonic assisted thermoforming for rapid fabrication of a microspeaker diaphragm

Bae HJ, Park K (2015) Design and analysis of ultrasonic horn for polymer sheet forming. Int J Precis Eng Manuf Green Technol 3(1). doi: 10.1007/s40684-016-0007-5

Collins P, Harkin-Jones EMA, Martin PJ (2002) The role of tool/sheet contact in plug-assisted thermoforming. Int Polym Process 17(4):361–369

Hosseini H, Vasilivich BB, Mehrabani-Zeinabad A (2006) Modeling of deformation processes in vacuum thermoforming of a pre-stretched sheet. Polym Plast Technol Eng 45(12):1357–1362

Hwang SM, Lee HJ, Hong KS, Kang BS, Hwang GY (2005) New development of combined permanent-magnet type microspeakers used for cellular phones. IEEE Trans Magn 41(5):2000–2003

Jung W, Park K (2014) Selective ultrasonic imprinting for micropattern replication on predefined area. Ultrasonics 54(6):1495–1503

Jung W, Lee HJ, Park K (2015) Micropattern replication characteristics in selective ultrasonic imprinting using negative masks. Int J Precis Eng Manuf 16(9):1999–2004

Khuntontong P, Blaser T, Schomburg WK (2009) Fabrication of molded interconnection devices by ultrasonic hot embossing on thin polymer films. IEEE Trans Electron Packag Manuf 32(3):152–156

Kim DC, Jeong HY (2015) An optimal design of the internal space in a micro-speaker module. Int J Precis Eng Manuf 16(6):1141–1147

Kim KM, Park K (2013) Numerical investigation on vibration characteristics of a micro-speaker diaphragm considering thermoforming effects. J Mech Sci Technol 27(10):2923–2928

Kwon JH, Hwang SM, School KSK (2007) Development of slim rectangular microspeaker used for minimultimedia phones. IEEE Trans Magn 43(6):2704–2706

Lee HJ, Park K (2014) Development of composite micro-patterns on polymer film using repetitive ultrasonic imprinting. Int J Precis Eng Manuf Green Technol 1(4):341–345

Li ZZ, Heo KS, Xuan DJ, Seol SY (2009) A study on cooling efficiency using 1-d analysis code suitable for cooling system of thermoforming. J Mech Sci Technol 23(3):607–613

Liao S, Gerhardy C, Sackmann J, Schomburg WK (2015) Tools for ultrasonic hot embossing. Microsyst Technol 21:1533–1541

Mekaru H, Takahashi M (2008) Ultrasonic nanoimprint on poly(ethylene terephthalate) at room temperature. Jan J Appl Phys 47:5178–5184

Mekaru H, Goto H, Takahashi M (2007) Development of ultrasonic micro hot embossing technology. Microelectron Eng 84(5–8):1282–1287

Michaeli W, Kamps T, Hopmann C (2011) Manufacturing of polymer micro parts by ultrasonic plasticization and direct injection. Microsyst Technol 17(2):243–249

Pillai MA, Deenadayalan E (2014) A review of acoustic energy harvesting. Int J Precis Eng Manuf 15(5):949–965

Sacristan M, Planta X, Morell M, Puiggali J (2014) Effects of ultrasonic vibration on the micro-molding processing of polylactide. Ultrason Sonochemistry 21(1):376–386

Seo YS, Park K (2012) Direct patterning of micro-features on a polymer substrate using ultrasonic vibration. Microsyst Technol 18(12):2053–2061

Shahosseini I, Lefeuvre E, Moulin J, Woytasik M, Martincic E, Pillonnet G, Lemarquand G (2013) Electromagnetic MEMS microspeaker for portable electronic devices. Microsyst Technol 19(6):879–886

Throne JL (1996) Technology of thermoforming. Hanser Verlag GmbH & Co, Munich