Transformer coupled plasma etch technology for the fabrication of subhalf micron structures

Carter, J. B.1, Holland, J. P.1, Peltzer, E.1, Richardson, B.1, Bogle, E.1, Nguyen, H. T.1, Melaku, Y.1, Gates, D.1, Ben‐Dor, M.1
1Lam Research Corporation, Fremont, California 94538