Touch mode capacitive pressure sensor for passive tire monitoring system
SENSORS, 2002 IEEE - Tập 2 - Trang 1582-1586 vol.2
Tóm tắt
This paper deals with silicon capacitive pressure sensor called "touch-mode" type . A touch mode capacitive pressure sensor that can be used in automobile tire pressure monitoring systems has been developed, and its structure and the fabrication process are described The morphology of the chemically etched diaphragm surface, which has a great influence on fracture toughness of the diaphragm, is focused on.
Từ khóa
#Capacitive sensors #Sensor systems #Tactile sensors #Tires #Monitoring #Chemical sensors #Silicon #Sensor phenomena and characterization #Automobiles #FabricationTài liệu tham khảo
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