Total ionizing dose effects in shallow trench isolation oxides

Microelectronics Reliability - Tập 48 Số 7 - Trang 1000-1007 - 2008
F. Faccio1, Hugh Barnaby2, Xiao J. Chen2, Daniel M. Fleetwood3, L. Gonella1, Michael Lee McLain2, Ronald D. Schrimpf3
1CERN, PH department, Route de Meyrin 385, 1211 Geneva 23 (Switzerland)
2Arizona State University, Department of Electrical Engineering , Tempe, AZ, 85287-5706, USA
3Vanderbilt University, Nashville, TN 37235, USA

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