Time-resolved electrical measurements of a pulsed-dc methane discharge used in diamond-like carbon films production

Thin Solid Films - Tập 482 - Trang 172-176 - 2005
C. Corbella1, M.C. Polo1, G. Oncins2, E. Pascual1, J.L. Andújar1, E. Bertran1
1FEMAN Group, Department de Física Aplicada i Òptica, Universitat de Barcelona, Av. Diagonal 647, E08028 Barcelona, Spain
2Serveis Científicotècnics, Universitat de Barcelona, PCB, C /Josep Samitier 1-5, E08028 Barcelona, Spain

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Thông tin
Thông tin xuất bản

Thin Solid Films

Tập 482

172-176

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