Thin films of solid electrolyte BaO(CeO/sub 2/)/sub 0.9/(Nd/sub 2/O/sub 3/)/sub 0.1/
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 3 pp. - 2002
Tóm tắt
In this paper the results of investigation of the thin films of the solid electrolyte BaO(CeO/sub 2/)/sub 0.9/(Nd/sub 2/O/sub 3/)/sub 0.1/ are presented. The thin films of the solid electrolyte have been made by the thermal resistive sputtering on the silicon and alumina substrates. The Raman spectra of these thin films are studied. The analysis of these spectra shows that the structure of the obtained thin films of the solid electrolyte BaO(CeO/sub 2/)/sub 0.9/(Nd/sub 2/O/sub 3/)/sub 0.1/ are like the structure of bulk samples of this electrolyte. The high temperature dependence of conductivity of the thin films of the solid electrolyte BaO(CeO/sub 2/)/sub 0.9/(Nd/sub 2/O/sub 3/)/sub 0.1/ is investigated. In terms of this dependence the values of the activation energy for conductivity are determined.
Từ khóa
#Transistors #Solids #Neodymium #Sputtering #Conductivity #Temperature #Hydrogen #Thin film sensors #Microelectronics #SiliconTài liệu tham khảo
kozlov, 2000, sensor based on solid electrolyte with proton conduction, Microsensorics (materials and element base), 113
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