Thin films of Zr/sub 1-x/Sn/sub x/TiO/sub 4/ for application in microelectronics
COMMAD 2000 Proceedings. Conference on Optoelectronic and Microelectronic Materials and Devices - Trang 379-382
Tóm tắt
Thin films of Zr/sub 1-x/Sn/sub x/TiO/sub 4/ (ZTS) were prepared by the polymeric precursor route. The influence of process parameters and dopants (Nb, Sb and Ta) on the chemical composition of the films was investigated by means of the XPS technique. Surface segregation of Sn/sup IV/ and the presence of Sn/sup 0/, Ti/sup II/, and Ti/sup III/ species in the films were revealed from XPS depth profiles.
Từ khóa
#Transistors #Zirconium #Tin #Microelectronics #Sputtering #Surface contamination #Electrostatics #Lenses #Gold #Chemical elementsTài liệu tham khảo
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