Thermomagnetic residual offset in integrated Hall plates

SENSORS, 2002 IEEE - Tập 2 - Trang 763-766 vol.2
P. Ruther1, U. Schiller2, W. Buesser3, R. Janke3, O. Paul2
1Institute for Mcrosystem Technology, Microsystem Materials Laboratory, University of Freiburg, Germany
2Microsystem Materials Laboratory, University of Freiburg, Germany
3Micronas AG, Freiberg, Germany

Tóm tắt

Integrated Hall plates show self-induced offset due to the current flow in its current leads. The magnetic field surrounding the current leads causes a magnetic offset signal, while their resistive heating causes thermoelectric offset voltages. This paper reports experimental results on these two effects. They are obtained using a novel test structure enabling one to separate the two contributions.

Từ khóa

#Current measurement #Thermoelectricity #Testing #Voltage measurement #Temperature #Magnetic field measurement #Thermoelectric devices #Magnetic fields #Resistors #Probes

Tài liệu tham khảo

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