The role of structural factor in In/sub 2/O/sub 3/ gas response
SENSORS, 2002 IEEE - Tập 2 - Trang 1214-1218 vol.2
Tóm tắt
In this paper we examined the influence of In/sub 2/O/sub 3/ film structure on their gas sensing characteristics. Films were deposited by spray pyrolysis from InCl/sub 3/-water solutions. Regularities of a correlation between gas sensing parameters and such structural parameters as film thickness, grain size, refraction index, and texturing were established. Some requirements of the In/sub 2/O/sub 3/ film structure for a gas sensor, designed for detection of both reducing and oxidizing gases, were formulated as well.
Từ khóa
#Grain size #Spraying #Optical films #Atmospheric measurements #Crystallization #X-ray scattering #Structural engineering #Atmosphere #Temperature #MicroelectronicsTài liệu tham khảo
korotcenkov, 2001, Possibilities of aerosol technology for deposition of SnO2-based films with improved gas sensing characteristics, Materials Science and Engineering, c 19, 73
10.1016/S0925-4005(98)00100-2
brynzari, 2000, Theoretical study of semiconductor thin film gas sensitivity: Attempt to consistent approach, Electronic Technol, 33, 225
10.1016/S0925-4005(02)00008-4
10.1016/S0925-4005(00)00455-X
10.1016/S0925-4005(97)00199-8
10.1016/S0040-6090(01)00978-6