The model of the thermoisolated area of the thermoresistive transducer
Proceedings. 3rd Annual Siberian Russian Workshop on Electron Devices and Materials - Tập 1 - Trang 3 pp. - 2002
Tóm tắt
The physics processes that take place in the multifunctional thermoresistive transducer were considered. For presented processes it was proposed to synthesize the structures based on principles of the quasianalog modeling and to use these structures for the theoretical model for the determination of the deformations in the base sensitive element of the transducer, solution the equation of the stability and the thermostability of the dielectric membrane of the sensitive element.
Từ khóa
#Thermoresistivity #Transducers #Micromechanical devices #Temperature sensors #Thermal stability #Dielectric substrates #Resistors #Heating #Physics #HumansTài liệu tham khảo
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