The investigation of an integrated gas sensor array

SENSORS, 2002 IEEE - Tập 1 - Trang 343 vol.1
Guizhen Yan1, P.C.H. Chan2, Min Miao1, J.K.O. Sin2, I-Ming Hsing3
1Institute of Microelectronics, Peking University, Beijing, China
2Department of E.E.E, Hong Kong University of Science and Technology, Hong Kong, China
3Kpt. of Ch.E, Hong Kong University of Science and Technology, Hong Kong, China

Tóm tắt

A micro integrated gas sensor array has been designed and fabricated with surface micro-machining technology. The sensor array consists of four elements integrated on a chip. Two different kinds of SnO/sub 2/ film were sputtered on the four sensors. Au and Pt were deposited on the surface of SnO/sub 2/ film as catalysts. The four sensors can be independently controlled by separate heater and temperature sensor. When implementing the function of electronic nose, the array can differentiate CO, NO/sub 2/ and H/sub 2/S and measure the concentration of each gas without the analysis of artificial neural network.

Từ khóa

#Sensor arrays #Gas detectors #Temperature sensors #Artificial neural networks #Gases #Thermal sensors #Electronic noses #Urban pollution #Sensor phenomena and characterization #Microelectronics

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SENSORS, 2002 IEEE

Tập 1

343 vol.1

Thông tin tác giả