The electrostatic potentials in an electron-cyclotron-resonance processing plasma
Tóm tắt
The axial distribution of the electrostatic potentials ofan electron-cyclotron resonance (ECR) processing plasma confined in a do magnetic mirror geometry was characterized. The potential profiles far argon and helium at 8.0x 10−4 and 4.0 × 10−4 Torr were measured using electron emissive probes. The experimental measurements were then compared with the predictions of a one-dimensional, electrostatic, particle-in-cell computer code which runs on a personal computer. The potential profiles as predicted by the code showed good agreement with the experimental measurements.
Tài liệu tham khảo
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